Pipe-type PECVD graphite boat assembling and disassembling piece system and process

Abstract

The invention relates to a pipe-type PECVD graphite boat assembling and disassembling piece system. The system comprises a graphite boat delivery mechanism (1), a silicon slice feeding mechanism (2), a silicon slice discharging mechanism (3), a silicon slice grabbing and delivery mechanism (4) and a graphite boat assembling and disassembling mechanism (5), wherein the graphite boat delivery mechanism is used for carrying a graphite boat to move horizontally; the silicon slice feeding mechanism is used for taking silicon slices to be processed out of a flower basket; the silicon slice discharging mechanism is used for conducting overturning and discharging on the processed silicon slices; the silicon slice grabbing and delivery mechanism is used for absorbing the silicon slices and delivering the silicon slices in a linear motion mode; the graphite boat assembling and disassembling mechanism is used for assembling and disassembling the graphite boats. The pipe-type PECVD graphite boat assembling and disassembling piece system is precise to position and high in production efficiency.

Description

technical field [0001] The invention relates to a graphite boat loading and unloading system and a process thereof, in particular to a system and a process for automatically and efficiently loading and unloading a graphite boat in tubular PECVD, and belongs to the technical field of solar photovoltaic production equipment. Background technique [0002] At present, in the production process of crystalline silicon solar cells, it is necessary to prepare a layer of silicon nitride anti-reflection film on the surface of the silicon wafer through PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment. Pull out the graphite boat, take out the silicon wafer from the graphite boat and put it into the empty flower basket (that is, the unloading process of the silicon wafer); then, before the empty graphite boat enters the PECVD furnace again, the non-reflective film that has completed the second cleaning needs to be remounted Silicon wafer (that is, the silicon wafer feeding pro...

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Problems solved by technology

[0002] At present, in the production process of crystalline silicon solar cells, it is necessary to prepare a layer of silicon nitride anti-reflection film on the surface of the silicon wafer through PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment. Pull out the graphite boat, take out the silicon wafer from the graphite boat and put it into the empty flower basket (that is, the unloading process of the silicon wafer); then, before the empty graphite boat enters the PECVD furnace again, the non-reflective film that has completed the second cleaning needs to be remounted Silicon wafer (that is, the silicon wafer feeding process); due to the weight of the graphite boat and the narrow gap between the electrode sheets of the graphite boat, the conventional manual handling of the graphite boat and manual loading and unloading of the wafers is labor-intensive, the production efficiency cannot be improved, and the debris rate is high. make the production cost high;

[0003] For this reason, the "Forty-eighth Research Institute of China Electronics Technology Group Corporation" proposed "a graphite boat automatic loading and unloading system for tubular PECVD" with the patent application number 201310592633.1 on November 22, 2013. Unloading and loading are carried out mechanically, but the silicon wafer grabbing and transferring mechanism is carried out by a six-axis robot. Due to the complex structure of the six-axis robot and the lack of independent domestic production of the six-axis robot, its cost is high; After being used for a long time, the axis robot is prone to errors in spatial positioning, which causes damage to the silicon wafers during the grasping process; and is limited by the grasping method of the six-axis robot, which can only grasp 20 silicon wafers at a time. Therefore, its efficiency still cannot meet the needs of mass production; and the pitch of the flower basket used in the above-mentioned conventional system is a standard pitch of 4.76mm, while the pitch of graphite boats and boats is 13.5mm, so it is necessary to adopt a special rewinding machine for Its pitch is sorted, which further affects the efficiency of production

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