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Radiological volt isotope battery and preparation method thereof

A technology of isotope battery and radiant volt, which is applied in the field of micro-energy, to achieve the effects of reducing carrier transport recombination loss, convenient loading, and reducing energy loss

Inactive Publication Date: 2015-03-04
INST OF NUCLEAR PHYSICS & CHEM CHINA ACADEMY OF
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in this patent, the epitaxial transducing device is only used to reduce the internal resistance of the transducing device and the preparation method of the ultra-shallow junction transducing device

Method used

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  • Radiological volt isotope battery and preparation method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] Such as figure 1 Among them, the resistivity is chosen to be 0.002Ω·cm -1 N + Type silicon substrate layer 2 is used as the substrate, and N-type doped epitaxial growth is carried out by LPCVD to form a doping concentration of 1×10 16 cm -3 , an epitaxial N-type silicon layer 3 with a thickness of 6 μm; an Au Schottky barrier metal layer 4 is patterned and evaporated on the epitaxial layer after surface treatment on the epitaxial silicon wafer, with a thickness of 30 nm; patterned evaporation is deposited on the metal surface of the barrier layer Au upper electrode 6 with a thickness of 1 micron; a Ti layer with a thickness of 0.7 micron is patterned and evaporated on the metal surface of the barrier layer; a 1 micron thick Au, Ag or Al lower electrode metal layer is evaporated after surface treatment on the back of the base layer 1; Scribing; Ti layer chemisorption tritium loading radioactive source at high temperature.

Embodiment 2

[0029] Such as figure 1 Among them, the lower electrode metal layer 1 is Ti / Ni / Au with a thickness of 1 micron, N + Type silicon substrate layer 2 resistivity is 0.002Ω·cm -1 , the doping concentration of the epitaxial N-type silicon layer 3 is 8×10 15 cm -3 , the thickness is 20 μm, the Schottky barrier metal layer 4 is Au, the thickness is 30nm; the insulating passivation layer 5 is silicon dioxide, the thickness is 100nm, the upper electrode metal 6 is Au with a thickness of 1 μm, and the radioactive isotope layer 7 for electroplating 63 Ni.

Embodiment 3

[0031] Such as figure 1 , the lower electrode metal layer 1 is 1 micron thick Au, N + Type silicon substrate layer 2 resistivity is 0.002Ω·cm -1 , the doping concentration of the epitaxial N-type silicon layer 3 is 5×10 15 cm -3 , the thickness is 30 μm, the Schottky barrier metal layer 4 is a 50nm sputtered Pt metal layer, the insulating passivation layer 5 is silicon dioxide, the thickness is 100nm, the upper electrode metal 6 is Au with a thickness of 1 μm, and a radioactive isotope layer is loaded 7 for electroplating 147 Pm.

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Abstract

The invention provides a radiological volt isotope battery. The radiological volt isotope battery consists of an epitaxial silicon base schottky junction transduction device and a loading radioactive source; the epitaxial silicon base schottky junction transduction device consists of a lower electrode metal layer, an N+ or P+ type silicon substrate layer, an epitaxial N or P type silicon layer, a schottky potential barrier metal layer, an insulated passivation layer and an upper electrode from bottom to top respectively. By using the characteristics of small internal resistance, enhanced back electric field effect and strong radiation resistance of the epitaxial silicon base schottky junction transduction device, the prepared radiological volt isotope battery has a simple structure, is easy to prepare, is convenient in isotope loading and realizes integration of the radioactive source and the transduction device.

Description

technical field [0001] The invention relates to a miniature isotope battery, in particular to a radiovoltaic isotope battery with an epitaxial silicon-based Schottky as a transducing device and a preparation method thereof, which is used to directly convert radioactive decay energy into electric energy, and belongs to microelectromechanical systems. micro energy field. Background technique [0002] The isotope battery is an energy supply device that converts the decay energy of radioactive isotopes into electrical energy through the energy conversion unit. The radiant voltaic isotope battery uses the built-in electric field of the PN junction or Schottky junction to separate the electron-hole pairs (EHPs) generated by the radiation emitted by the decay of the isotope in the semiconductor, and collect and extract it through two electrodes to generate current. Due to its compact structure, small size, long life, high reliability and maintenance-free characteristics, radiant v...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G21H1/06
CPCG21H1/06
Inventor 刘业兵杨玉青罗顺忠胡睿徐建王关全李昊钟正坤魏洪源
Owner INST OF NUCLEAR PHYSICS & CHEM CHINA ACADEMY OF
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