Integrated photoelectrical waveguide modulator with high efficient heat radiation structure and manufacturing method thereof
A technology of waveguide modulator and heat dissipation structure, which is applied in the field of laser communication, can solve the problems of cumbersome and complicated process and high requirements for the design of the new structure of the modulator, and achieve the effects of simple process, thermal drift suppression, and efficient heat dissipation
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[0035] The size of the lithium niobate crystal selected in this embodiment is 40mm×10mm×2mm, the size of the diamond sheet is 40mm×10mm×1mm, the width of the lithium niobate optical waveguide in the electro-optic waveguide modulator component is 5-8 μm, gold The total thickness of the electrode layer and the chrome-gold layer is 6-15 μm.
[0036] In this embodiment, the specific implementation steps of preparing the integrated electro-optic waveguide modulator are given, including the steps of preparing the components of the electro-optic waveguide modulator and the steps of adding a heat dissipation structure, as follows:
[0037] (1), select an x-cut lithium niobate wafer with a size of 40mm×10mm×2mm;
[0038] (2), successively use absolute ethanol, acetone, trichlorethylene and deionized water to clean the wafer;
[0039] (3) After cleaning the wafer, use a pure nitrogen spray gun to blow the wafer, and the blowing direction of the air flow starts from the center of the wa...
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