Carbon/carbon composite component chemical vapor deposition device
A carbon composite material and chemical vapor infiltration technology, which is applied in the field of chemical vapor deposition furnace preparation devices, can solve the problems of low infiltration efficiency, low utilization rate of reaction gas, etc., so as to improve infiltration rate, improve densification efficiency, improve The effect of utilization
Active Publication Date: 2017-01-25
PLA NO 5719 FACTORY
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Problems solved by technology
To solve the problems of low reaction gas utilization rate and low infiltration efficiency existing in chemical vapor deposition in the prior art
Method used
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Embodiment 1
[0038] (1) Furnace loading: put 20 composite material prefabricated bodies (200mm×200mm×16mm) 5-4 horizontally into the porous graphite liner 5-2 in the chemical vapor deposition furnace 6, place the annular graphite tube 5- 1 Place it on the porous graphite liner 5-2, and cover the graphite cover plate 5-6 on the annular graphite tube 5-1 to form a closed percolation chamber 5;
[0039] The thickness of the porous graphite liner is 30mm, the large air guide hole 5-5 is 260mm, and the small air guide hole 5-3 is 13mm.
[0040] The graphite cover plate 5-6 has a thickness of 40mm, and the annular graphite cylinder has a height of 300mm and a thickness of 30mm.
[0041] (2) Vacuumize and check for leaks: evacuate the chemical vapor deposition furnace 6 until the pressure of the second absolute pressure gauge 2-2 is 500Pa, stop vacuuming, and check that the pressure of the chemical vapor deposition furnace 6 is not obvious Variety;
[0042] (3) Power up and heat up: power up an...
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Abstract
The invention brings forward a carbon / carbon composite component chemical vapor infiltration device and aims to provide a device for solving problems of low reactant gas utilization rate and low infiltration efficiency existing by chemical vapor infiltration in the prior art. The invention is realized by the following technical scheme: a gas mixing and preheating device for primary control of reactant gas diversion direction and a temperature sensor for monitoring preheating temperature of reactant gas are arranged below a deep gas-mixing and outgassing device connected with a sealed infiltration chamber; the regulated and controlled reactant gas enters a gas mixing and preheating device from the bottom of a chemical vapor deposition furnace body through a gas supply device, and a controller automatically regulates electric power on a heater to obtain required preheating temperature; and the preheated reactant gas enters the sealed infiltration chamber and passes through a porous graphite liner plate to infiltrate through a composite preform placed inside the sealed infiltration chamber, and chemical vapor infiltration is performed under constant values by pressure control of a furnace pressure controller and temperature control of a temperature control sensor.
Description
technical field [0001] The invention relates to a chemical vapor deposition furnace preparation device in the field of composite materials. Background technique [0002] Carbon / carbon composite material is a carbon fiber reinforced carbon matrix composite material, based on the unique electronic arrangement of carbon atoms and its graphite-like structure and good biocompatibility, it is considered to be an ideal conductive material, high temperature composite Structural materials, functional materials and biological materials can be widely used in aviation, aerospace, biology and various civil fields. Various preparation methods of composite materials have a problem of high cost. For example, the commonly used isothermal CVI process requires hundreds or even more than a thousand hours of densification time. The cycle is long, the cost is high, and equipment operation is difficult, resulting in high product costs. One point seriously restricts the further application and dev...
Claims
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IPC IPC(8): C23C16/26C23C16/52
Inventor 张铀徐春叶勇松彭中亚杨东玲刘俊伶张良成古文学
Owner PLA NO 5719 FACTORY