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A method for preparing nano-patterned substrates using aao templates

A nano-pattern and substrate technology, applied in the field of patterned substrate preparation, can solve problems such as LED patterned substrate technology that has not yet been seen in AAO, and achieve the effects of improving external quantum effects, reducing manufacturing costs, and changing optical paths.

Inactive Publication Date: 2017-08-29
XIAN SHENGUANG ANRUI PHOTOELECTRIC TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, AAO has not been applied to LED patterned substrate technology

Method used

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  • A method for preparing nano-patterned substrates using aao templates
  • A method for preparing nano-patterned substrates using aao templates

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Embodiment Construction

[0034] The following combination figure 2 , describe in detail the preferred implementation process of the present invention:

[0035] 1. In Al 2 o 3 A layer of aluminum with a thickness of 2-10 μm is physically sputtered or thermally evaporated on a single crystal substrate. The target material is a high-purity aluminum target with a purity of 99.99%. The sputtering temperature is 80-150°C, and the evaporation temperature is 1000-1200°C. .

[0036] 2. Then perform high-temperature annealing on the substrate with the aluminum film, the annealing temperature is 300-350° C., and the time is 1-2 hours. After annealing, use H on the substrate sheet 2 SO 4 (98%): H 2 o 2 (30%)=3:1~4:1 mixed solution to wash and shake dry.

[0037] 3. Carry out anodic oxidation on the substrate with aluminum thin layer, using sulfuric acid with a concentration of 0.3-0.8mol / L as electrolyte, oxidation voltage of 10-25V, temperature of 0-5°C, and oxidation time of 2-7h. (If oxalic acid with...

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PUM

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Abstract

The invention belongs to the technical field of LED patterned substrates, and provides a method for preparing a nano patterned substrate by utilizing an AAO template. The method comprises the following steps of preparing an ordered AAO template on a mono-crystal substrate; then etching by a wet process or a dry process so as to copy a duct in the AAP template on the mono-crystal substrate, thereby obtaining the nano duct patterned substrate finally. The preparation method of the nano patterned substrate provided by the invention can be used for improving the light efficiency of a GaN based LED as well as reducing the manufacturing cost.

Description

Technical field: [0001] The invention belongs to the technical field of LED patterned substrates, and mainly relates to a preparation method of patterned substrates. Background technique: [0002] Patterned substrate is currently a widely used substrate technology in commercialization. It can not only improve the crystal quality of the GaN-based LED epitaxial layer, but also change the optical path in the epitaxial layer to increase the luminous intensity. However, the PSS process requires the use of lithography technology, and its core equipment lithography machine is expensive, and the lithography technology has many pattern defects (such as missing patterns, poor pattern uniformity, etc.), these factors limit the patterned substrate technology development. [0003] AAO (Anodic Aluminum Oxide) templates are also called porous anodized aluminum oxide templates. This material can self-organize and grow into a nanoscale close-packed columnar pore structure. Ordered AAO temp...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/18C25D11/12H01L33/00H01L33/20
Inventor 韩沈丹黄宏嘉
Owner XIAN SHENGUANG ANRUI PHOTOELECTRIC TECH