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Manufacturing method of masks

A manufacturing method and mask technology, applied in ion implantation plating, metal material coating process, coating and other directions, can solve problems such as uneven deformation of the mask, reduce shrinkage deformation problems, reduce shrinkage deformation , the effect of improving quality

Active Publication Date: 2015-05-13
TRULY HUIZHOU SMART DISPLAY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In view of this, the technical problem to be solved by the present invention is to provide a method for manufacturing a mask that can reduce the uneven deformation of the mask caused by tension

Method used

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  • Manufacturing method of masks

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Effect test

Embodiment 1

[0028] The special low-expansion iron-nickel alloy Invar36 material with ultra-low expansion coefficient is used to make the shielding mask and the mask. The sizes of the shielding mask and the mask are: the thickness is 30um, the width is 60mm, and the length is 1000mm . In an environment with a workshop temperature of 25°C, the shielding mask and the mask are respectively tensioned and fixed on the mask frame with a tension of 20N, and the elastic modulus of the iron-nickel alloy Invar36 is E=1.48×10 11 N / ㎡, the coefficient of thermal expansion is ξ= 1.2×10 -6 m / ℃, then the length deformation of the shielding mask and the mask △L= F×L / (E×A)=20N×1m / (1.48×10 11 N / ㎡×6×10 -2 m×3×10 -5 m)=0.75×10 -4 m=75um; △B=△L×U1 / U2=△L×P=0.75×10 -4 m×0.3=22.5×10 -6 m =22.5um; At this time, the temperature of the workshop should be controlled as: T2=△L / (L×ξ)+T1=0.75×10 -4m / (1m×1.2×10 -6 m / °C)+25°C=62.5°C+25°C=87.5°C, if the mask frame with the block mask and the mask plate fixed is pl...

Embodiment 2

[0030] The special low-expansion iron-nickel alloy Invar36 material with ultra-low expansion coefficient is used to make the shielding mask and the mask. The sizes of the shielding mask and the mask are: the thickness is 30um, the width is 60mm, and the length is 1000mm . In an environment with a workshop temperature of 25°C, the shielding mask and the mask are respectively tensioned and fixed on the mask frame with a tension of 50N, and the elastic modulus of the iron-nickel alloy Invar36 is E=1.48×10 11 N / ㎡, thermal expansion absorption is ξ= 1.2×10 -6 m / °C, then the length deformation of the shielding mask and the mask △L= F×L / (E×A)=50N×1m / (1.48×10 11 N / ㎡×6×10 -2 m×3×10 -5 m)=1.877×10 -4 m=187.7um; △B=△L×U1 / U2=△L×P=1.877×10 -4 m×0.3=56.31×10 -6 m =56.31um; At this time, the temperature of the workshop should be controlled as: T2=△L / (L×ξ)+T1=1.877×10 -4 m / (1m×1.2×10 -6 m / °C)+25°C=156.4°C+25°C=181.4°C, if the mask frame with the block mask and mask plate fixed is pl...

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Abstract

The invention discloses a manufacturing method of masks. The manufacturing method comprises the following steps: (1) measuring an environment temperature T1; (2) tensioning the two ends of a shielding mask, and fixing the shielding mask on a mask frame and calculating the deformation of the shielding mask; (3) fixing masks in the left region and the right region of the mask frame, respectively, wherein the edges of the masks are as long as the overlapping part of the shielding mask; calculating the deformation of the masks; (4) putting the mask frame on which the shielding mask and the masks are fixed into a heating room and heating to a temperature T2 for thermal expansion; (5) welding and fixing the overlapping regions of the masks and the shielding masks in an environment at the temperature T2; and (6) taking out the mask frame from the heating room and cooling to the temperature T1. By the manufacturing method dislcosed by the invention, the shrinking deformation problem due to tension can be effectively reduced and the quality of the mask is improved, and the method is capable of meeting the requirements of manufacturing the masks of high PPI display screen products.

Description

technical field [0001] The invention belongs to the field of manufacturing organic light-emitting display devices, and in particular relates to a method for manufacturing a mask plate. Background technique [0002] Organic laser diodes, also known as Organic Light-Emitting Diodes (OLED for short), are self-luminous devices that do not require a backlight source and have the advantages of light and thin appearance, while traditional liquid crystal displays (LCDs) require backlight sources To work, the exterior dimensions are thicker. At the same time, the organic electro-mechanical laser display also has low power consumption, wide viewing angle, and fast screen response, which is the technology that best meets people's future functional requirements for displays. Therefore, organic electro-laser displays are expected to replace liquid crystal displays in the near future and have high market potential. [0003] In the manufacturing process of organic electro-laser displays,...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 马得贵吴俊雄冉应刚王红英柯贤军苏君海李建华
Owner TRULY HUIZHOU SMART DISPLAY
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