Analysis system and method for measuring impurity components in high-purity gas

Abstract

The invention discloses an analysis system and a measurement method for measuring impurity components in high-purity gas, that is, the system integrates a helium ionization detector, a hydrogen flame detector, seven valves, seven columns, and three sample quantitative loops into one analysis system , realize the detection of various high-purity gases on one analysis system, such as high-purity ammonia, high-purity oxygen, high-purity nitrogen, and various impurity components in high-purity hydrogen, such as nitrogen, hydrogen, oxygen / argon, carbon monoxide, carbon dioxide and Methane, ethane / ethylene, acetylene, C3 hydrocarbon impurities; this method adjusts the switch of the valve so that the impurities in the high-purity gas are separated by the chromatographic column and then detected by the helium ionization detector and the hydrogen flame detector to obtain the determination of the impurities data. The analysis system can detect a variety of impurity components in a variety of high-purity industrial gases, reducing the cost of determination; this method meets the sensitivity requirements of high-purity gas analysis and the detection limit requirements of various impurity gases, and greatly improves the efficiency of determination and analysis.

Description

Technical field

[0001] The invention relates to an analysis system and a measuring method for measuring impurity components in high-purity gas. Background technique

[0002] High-purity industrial gas is a term used in the gas industry. It usually refers to a gas with a certain level of purity that can be achieved by modern purification technology. For different types of gases, the purity indicators are different. For example, for nitrogen, hydrogen, argon, and helium, it usually refers to high-purity gas with a purity of 99.999% or higher; for oxygen, a purity of 99.99% can be called high-purity. Oxygen; For hydrocarbons, 99.99% purity can be regarded as high purity gas. In addition to high-purity hydrogen, high-purity oxygen, high-purity nitrogen and other permanent gases and high-purity helium, high-purity argon, high-purity neon and other rare gases, it also includes high-purity methane, high-purity ethane and other hydrocarbon gases, as well as high-purity chlorine and high...

Examples

Embodiment Construction

[0021] Such as figure 1 As shown, the analysis system of the present invention for measuring impurity components in high-purity gas includes a ten-way valve V1, a first six-way valve V2, a second six-way valve V3, a third six-way valve V5, a fourth six-way valve V7, and a A four-way valve V4, a second four-way valve V6, the first column A1, the second column A2, the third column A3, the fourth column A4, the fifth column A5, the sixth column A6, deoxygenation Column A7, the first sample loop B1, the second sample loop B2, the third sample loop B3, the helium ionization detector C1 and the hydrogen flame detector C2, the first port of the ten-way valve A1 is connected to the The input end of the second sample quantitative loop B2, the eighth port are connected to the output end of the second sample quantitative loop B2, the fourth port is connected to the input end of the first chromatographic column A1, and the seventh port is connected to the first The output end, the second p...

Technical field

[0001] The invention relates to an analysis system and a measuring method for measuring impurity components in high-purity gas. Background technique

[0002] High-purity industrial gas is a term used in the gas industry. It usually refers to a gas with a certain level of purity that can be achieved by modern purification technology. For different types of gases, the purity indicators are different. For example, for nitrogen, hydrogen, argon, and helium, it usually refers to high-purity gas with a purity of 99.999% or higher; for oxygen, a purity of 99.99% can be called high-purity. Oxygen; For hydrocarbons, 99.99% purity can be regarded as high purity gas. In addition to high-purity hydrogen, high-purity oxygen, high-purity nitrogen and other permanent gases and high-purity helium, high-purity argon, high-purity neon and other rare gases, it also includes high-purity methane, high-purity ethane and other hydrocarbon gases, as well as high-purity chlorine and high...

Examples

Embodiment Construction

[0021] Such as figure 1 As shown, the analysis system of the present invention for measuring impurity components in high-purity gas includes a ten-way valve V1, a first six-way valve V2, a second six-way valve V3, a third six-way valve V5, a fourth six-way valve V7, and a A four-way valve V4, a second four-way valve V6, the first column A1, the second column A2, the third column A3, the fourth column A4, the fifth column A5, the sixth column A6, deoxygenation Column A7, the first sample loop B1, the second sample loop B2, the third sample loop B3, the helium ionization detector C1 and the hydrogen flame detector C2, the first port of the ten-way valve A1 is connected to the The input end of the second sample quantitative loop B2, the eighth port are connected to the output end of the second sample quantitative loop B2, the fourth port is connected to the input end of the first chromatographic column A1, and the seventh port is connected to the first The output end, the second p...

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