Reverse ultrasonic assisted gas-liquid-solid three-phase abrasive particle flow polishing processing method and device

Abstract

The present invention discloses a reverse ultrasonic assisted gas-liquid-solid three-phase abrasive particle flow polishing processing method and device, an ultrasonic generator is mounted in a position which is reverse in direction to abrasive particle flow, an included angle is formed between the abrasive particle flow direction and the position, a reverse ultrasonic is produced, the direction of the reverse ultrasonic is reverse to that of the abrasive particle flow, an included angle is formed between the abrasive particle flow direction and the reverse ultrasonic, the reverse ultrasonic can compress micro-sized bubbles near workpiece machining surface in an abrasive particle flow medium containing the micro-sized bubbles to collapse and perish the micro-sized bubbles, when the micro-sized bubbles are collapsed and perished, a reverse micro shock wave is produced, the direction of the reverse micro shock wave is reverse to that of the abrasive particle flow, the reverse micro shock wave allows the inner local area of the abrasive particle flow to produce a great pressure so as to produce microscopic explosion effect; two component forces are generated by the microscopic explosion effect, a vertical component force is used for improving the contact probability and acting force of abrasive particles and workpiece machining surface convex peaks, a reverse horizontal component force is used for forming relative block effect on the abrasive particles, the abrasive particle and workpiece action time is increased, and the abrasive particle flow polishing efficiency is greatly improved.

Description

technical field [0001] The invention relates to the field of soft fluid surface grinding and polishing, and more specifically relates to a reverse ultrasonic-assisted gas-liquid-solid three-phase abrasive flow polishing method and device. Background technique [0002] In high-tech fields such as modern optics, electronic information and thin film science, it is necessary to realize ultra-smooth surface manufacturing (Ultrasmooth Surface Manufacturing) on ​​the surface of precision optical parts and functional crystal materials, such as soft X-ray optical systems, laser gyro mirrors, high-density wave Demultiplexer, high-energy laser mirror, functional optical device, optical window, etc. [0003] The liquid-solid two-phase soft abrasive flow polishing process that appeared in the early stage is based on the turbulent flow of the abrasive flow, based on the collision between the abrasive particles and the collision between the abrasive particles and the wall, and the dynamics...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to solve the problem that the polishing effect of the workpiece is not obvious when the surface of the workpiece is polished by abrasive flow in the prior art, and proposes a reverse ultrasonic-assisted gas-liquid-solid three-phase abrasive flow polishing method and device

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