Compound molecular pump

Abstract

The invention provides a compound molecular pump. A plurality of layers of stator blades are sequentially and fixedly mounted on the inner wall of a pump shell in the axial direction, and a main shaft is vertically arranged in the pump shell; rotors comprise a turbine stage rotor and a traction stage rotor; a plurality of layers of rotor blades are sequentially distributed and arranged on the periphery of the turbine stage rotor in the axial direction, and the rotor blades and the stator blades are alternatively arranged in the axial direction and are opposite in the inclined direction; compound spiral groove stators comprise horizontal type spiral groove stators and vertical type spiral groove stators, wherein the horizontal type spiral groove stators and the vertical type spiral groove stators are connected into a whole; and the rotor blades on the bottommost layer match the horizontal type spiral groove stators. Sensors and heating devices are arranged in material sedimentary areas in molded line spiral flow guide grooves, and the lower end of the main shaft is sleeved with a radial magnetic bearing. The compound molecular pump is compact in structure, and under the premise of the large pumping speed and the high compression ratio, rotating speed sudden increasing, high temperature resisting and corrosion resisting of the rotors in the short time can be achieved; material sedimentation can be effectively reduced; and the health state of the molecular pump can be monitored in real time, and the molecular pump can be prevented from losing efficacy in time.

Description

technical field [0001] The invention relates to a molecular pump, in particular to a composite molecular pump. Background technique [0002] After nearly 100 years of development, the molecular pump has been widely used in engineering practice, mainly because it has a high compression ratio for gases with large molecular weight, and can obtain a clean vacuum environment. In the system, the oil diffusion pump has been replaced by a turbomolecular pump. As a very important subsystem of semiconductor, glass coating and liquid crystal display equipment, turbomolecular pump is widely used in etching, low pressure chemical vapor deposition (Low Pressure Chemical Vapor Deposition, referred to as LPCVD), metal organic chemical vapor deposition (Metal -organic Chemical Vapor Deposition, referred to as MOCVD), ion implantation and sputtering processes. The main problem of turbomolecular pumps is that when the inlet pressure is on the order of 1.33Pa, its effective pumping speed will...

AI Technical Summary

Problems solved by technology

However, under the influence of controller failure, external interference or other failures, the magnetic bearing cannot ensure that the rotor main shaft remains at the target position, that is, the main shaft will undergo radial displacement, and the distance between the main shaft and the magnetic bearing will change, so that the rotor will be in contact with the magnetic bearing during high-speed rotation. The stator collided, causing the molecular pump to fail and causing serious losses

[0008] In addition, the pressure, temperature, pH and other conditions of the gas absorbed by the molecular pump will also affect the health performance of the molecular pump and affect the normal use of the molecular pump

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