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Manufacturing method of optical element and manufacturing method of antireflection structure

A technology for optical components and manufacturing methods, applied in the directions of optical components, optics, instruments, etc., can solve the problems of high cost, laborious mask forming operation, complicated device, etc.

Inactive Publication Date: 2016-12-28
KONICA MINOLTA INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although it is conceivable to apply the above method to form a mask on a curved surface, as the incident angle of the exposure light increases, the light intensity decreases. Therefore, the film thickness of the resist varies depending on the incident angle of the exposure light, and it is difficult to uniformly Form a mask
In addition, it is necessary to tilt the light source according to the curved surface, making the device complicated
In addition, the mask formation operation is laborious, and the cost is high if the lenses are processed one by one.
In addition, a method of forming an anti-reflection structure on the surface of the base material by EB (Electron Beam: Electron Beam) drawing method is also conceivable, but there are problems in terms of feasibility and cost

Method used

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  • Manufacturing method of optical element and manufacturing method of antireflection structure
  • Manufacturing method of optical element and manufacturing method of antireflection structure
  • Manufacturing method of optical element and manufacturing method of antireflection structure

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no. 1 approach 〕

[0047] A method of manufacturing an optical element and a method of manufacturing an antireflection structure according to a first embodiment of the present invention will be described with reference to the drawings.

[0048] Figure 1C The optical element shown is the lens unit 200 by Figure 1A And the optical member array 100 shown to 1B etc. are laminated|stacked and cut and formed. Here, first, the optical member array 100 will be described. In addition, the optical member array 100 itself may be used as an optical element.

[0049] optical component array

[0050] Such as Figure 1A As shown in and 1B , the optical member array 100 is disc-shaped and has a substrate 101 , a first lens array layer 102 and a second lens array layer 103 . The optical member array 100 has a structure in which compound lenses 10 described later are arranged in a matrix and integrally formed. For ease of illustration, only four compound lenses 10 are illustrated, but an actual optical me...

no. 2 approach 〕

[0130]Hereinafter, a method of manufacturing the optical element of the second embodiment and the like will be described. In addition, the manufacturing method and the like of the optical element of the second embodiment are changed from the manufacturing method of the optical element of the first embodiment, and matters not particularly described are the same as those of the first embodiment.

[0131] Such as Figure 13A And 13B, 11 d of 1st optical surfaces have a composite surface including the surface with a large surface angle. 11 d of 1st optical surfaces are convex-shaped surfaces as a whole, and the center, ie, the vicinity of optical axis OA is recessed. 11 d of 1st optical surfaces are divided into 1st area|region and 2nd area|region when divided into some area|region similarly to 1st Embodiment. Specifically, as the second region, the portion A2 having a large plane angle is provided on the center side and the outer edge side of the first optical surface 11d. In ...

no. 3 approach 〕

[0134] Hereinafter, a method of manufacturing the optical element of the third embodiment and the like will be described. In addition, the manufacturing method and the like of the optical element of the third embodiment are changed from the manufacturing method of the optical element of the first embodiment, and matters not particularly described are the same as those of the first embodiment.

[0135] In the present embodiment, among the plurality of regions of the first optical surface 11d, regions different from the first and second regions are divided into one or more regions, and after the second structure forming process, the number of divided regions is compared with that of the divided regions. The same mask forming step as the second mask forming step and the same etching step as the second etching step. That is, the antireflection structure 51 is formed by dividing the first optical surface 11d into three or more regions without being limited to the first and second r...

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Abstract

An object of the present invention is to provide a method for manufacturing an optical element that can uniformly and easily produce an antireflection structure over the entire non-flat surface. A method for manufacturing an optical element array (100) having a first optical surface (11d) that is a macroscopically non-flat surface includes dividing the first optical surface (11d) into a plurality of areas and dividing the first optical surface (11d) into a plurality of areas. A first mask forming step of forming an island-shaped mask in a first region among a plurality of regions; etching the first region in which the island-shaped mask is formed in the first mask forming step to form a mask in the first region a first etching process of the anti-reflection structure (51); and a second mask forming process of forming an island-shaped mask for a second area different from the first area among the plurality of areas after the first etching process; and A second etching step of etching the second region in which the island-shaped mask is formed in the second mask forming step to form an antireflection structure (51) in the second region.

Description

technical field [0001] The present invention relates to a method of manufacturing an optical element having an antireflection structure on the surface of the optical element and a method of manufacturing the antireflection structure. Background technique [0002] Generally, optical lenses used in camera modules and the like are anti-reflection processed to reduce ghosting and flare caused by surface reflection. As the most commonly used antireflection processing, there is a method of providing an optical thin film called an antireflection film (for example, refer to Patent Document 1). [0003] In addition, as another antireflection processing method, there is a method of providing an antireflection structure. The anti-reflection structure is a structure in which the surface of an optical element such as a lens has other concavo-convex shapes at the wavelength level of light or a part with a low density in a macroscopic view to reduce reflection. There is a method for prod...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B1/118G02B3/00
CPCG02B1/118G02B3/00G02B3/0031
Inventor 平田健一郎
Owner KONICA MINOLTA INC