Magnetic feeding type electrolysis electric spark combined machining method and device

Abstract

The invention provides a magnetic feeding type electrolysis electric spark combined machining method and device. A magnetic field is generated by an electromagnetic device, pushing force is generated under the effect that same magnetic poles of the magnetic field repel each other to push a sliding base, and the sliding base drives workpieces to conduct feeding; a force sensor and a distance sensor are arranged, and the contact force between an electrode of a tool and the workpieces and the machined depths of the workpieces are detected; data are collected through a data collecting card and uploaded to a computer, and analysis and comparison are carried out through the computer; and the contact force between the electrode of the tool and the workpieces is accurately adjusted through a control system, the magnitude of contact force generated when the workpieces are located at the positions with different depths is adjusted, and a force feedback adjusting system and a machining depth feedback adjusting system are constructed. The magnetic feeding type electrolysis electric spark combined machining method and device are suitable for efficient and accurate machining of insulation crisp and hard materials, and belongs to the field of special machining in the manufacturing technology.

Description

technical field [0001] The invention relates to the field of special processing in manufacturing technology, in particular to a method and device for magnetic-feed type electrolysis and electric spark composite processing. Background technique [0002] Micro-electromechanical systems (MEMS, Micro-electromechanicalSystems) refer to micro-devices or systems that can be mass-produced, integrating micro-mechanisms, micro-sensors, micro-actuators, signal processing and control circuits, until interfaces, communications and power supplies are integrated. At present, MEMS has played an important role in communication, new energy, biomedicine, aerospace, precision instruments and other fields. Insulating hard and brittle materials represented by glass have excellent properties such as high hardness, chemical corrosion resistance, transparency and good biocompatibility. They are used in micro-accelerators, micro-reactors, micro-pumps, medical devices and optical systems in MEMS Ther...

AI Technical Summary

Problems solved by technology

However, the disadvantage of gravity feed is that the pressure between the electrode and the workpiece is constant throughout the machining process and cannot be controlled to change

When the thickness of the material is small, or as the processing progresses, the remaining material thickness is small, the material may be directly damaged by the pressure, thus affecting the processing accuracy, and the friction and damping between the mechanical structures will affect the control accuracy, so it is necessary to give a good lubricating

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