The invention discloses laser induced low pressure jet flow combined etching processing method and device thereof. The method comprises the following steps: the operations of cutting, drilling and slotting are performed on a workpiece by utilizing high-energy laser beams generated by a laser processing system, and meanwhile erosion is performed on the material surface subjected to laser ablation through high-speed jet flow beams generated by a corrosive medium jet flow device, so that the purpose of removing the material is achieved; the device comprises a laser device and a power source, and further comprises a jet flow generation device and a corrosion liquid circulating reflux device, wherein the jet flow device comprises a corrosion liquid tank, a plunger piston high pressure pump, a pressure gauge, an accumulator, a one-way control valve, a corrosion-resistant spray nozzle and a jet flow device fixed fixture. The method disclosed by the invention has the advantages that the laser ablation is mainly performed, the cooling of high-speed corrosive medium jet flow beams, synchronous erosion and combined processing effect of the cooling and the erosion are added on the basis of the laser ablation, so that the laser induced low pressure jet flow combined etching processing of the material is realized; the invention provides an efficient, clean and combined etching processing process.