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Method for producing three-dimensional connected micro-channel based on spatially selective induction of glass phase separation

A glass phase separation and selectivity technology, applied in the field of preparation of three-dimensional connected microchannels, can solve the problems of uneven size, clogging, affecting application, etc., and achieve the effect of promoting physical and chemical reactions, simple preparation process and uniform diameter

Inactive Publication Date: 2015-11-18
SOUTH CHINA UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But its disadvantage is that the prepared microchannel is affected by the blockage of debris in the channel after acid corrosion, the length of the microchannel is limited and the size is not uniform, which affects its application.
In addition, the internal morphology of the microchannels prepared by the above two traditional methods is single, and cannot be adjusted according to specific application requirements, such as disturbing the fluid in the channel, controlling the flow rate of the fluid, and improving the mixing degree of the two-phase solution, etc.

Method used

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  • Method for producing three-dimensional connected micro-channel based on spatially selective induction of glass phase separation
  • Method for producing three-dimensional connected micro-channel based on spatially selective induction of glass phase separation
  • Method for producing three-dimensional connected micro-channel based on spatially selective induction of glass phase separation

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] The glass component used in this embodiment is 79SiO 2 -21Na 2 O, the method for preparing three-dimensional connected microchannels based on spatially selective induction of glass phase separation in this embodiment comprises the following steps:

[0033] (1) Using glass as the base material, keep the femtosecond laser focused inside the glass, move the glass continuously at a speed of 5 μm / s in the three-dimensional space, and selectively induce the phase separation structure in the inner space of the glass; among them, the femtosecond laser repetition rate 500KHz, pulse width 370fs, power 1.2W, using a microscope objective lens with NA=0.85 to focus the laser on the inside of the glass, and the focus point is 300μm away from the surface;

[0034] (2) placing the glass obtained in step (1) in a muffle furnace at 575° C. for 3 hours;

[0035] (3) Carry out side polishing to the glass obtained in step (2), so that the laser etching area is exposed on the end face, the...

Embodiment 2

[0038] The glass components are the same as in Example 1, and the reaction conditions and processes for preparation are the same as in Example 1, except that the numerical aperture of the microscope objective lens used in Example 2 is 0.55.

[0039] Figure 2a It is a scanning electron microscope photo of the cross-section of the glass microchannel in Example 2. It can be seen from the figure that the channel has connectivity, the length is about 10 mm, and the diameter is about 30 μm and is relatively uniform. Figure 2b for Figure 2a Partially enlarged scanning electron microscope photos in the middle, it can be seen from the figure that the bottom of the channel is a continuous convex shape. After the microchannel prepared in Example 2 was immersed in the rhodamine solution, the rhodamine was evenly distributed in the channel, and the connectivity was good.

Embodiment 3

[0041] The glass components are the same as in Example 1, and the reaction conditions and processes for preparation are the same as in Example 1, except that the numerical aperture of the microscope objective lens used in Example 3 is 0.45.

[0042] Figure 3a It is a scanning electron microscope photo of the cross-section of the glass microchannel in Example 3. It can be seen from the figure that the channel has connectivity, the length is about 10 mm, and the diameter is about 30 μm and is relatively uniform. Figure 3b for Figure 1a Partially enlarged scanning electron microscope photos in the middle, it can be seen from the figure that the channel structure is connected by a series of dots and holes. After the microchannel prepared in Example 3 was immersed in the rhodamine solution, the rhodamine was evenly distributed in the channel, and the connectivity was good.

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Abstract

The invention discloses a method for producing a three-dimensional connected micro-channel based on spatially selective induction of glass phase separation. The method comprises the following steps: 1, keeping femtosecond laser focused in glass used as a substrate material, continuously moving the glass in a three-dimensional space, and selectively inducing a phase separation structure in the space in the glass to form an etching area in the glass, wherein the glass is sodium silicate or sodium borosilicate glass; 2, carrying out heat treatment on glass obtained in step 1 in a muffle furnace; and 3, polishing the glass obtained in step 2 to make the etching area exposed in an end surface, and carrying out acid treatment to corrode in order to form the micro-channel structure. The method is simple, and channel has the advantages of uniform aperture, long length, controllability of the internal morphology, and no autofluorescence interference, and can be applied in the fields of biological cell detection, chemical reaction synthesis and micro-fluid sensing.

Description

technical field [0001] The invention relates to a preparation method of a three-dimensional interconnected microchannel, in particular to a method for preparing a three-dimensional interconnected microchannel based on spatially selective induction of glass phase separation. Background technique [0002] Microfluidic chips can manipulate fluids at the micron scale, can detect, transport, mix, separate biological cells and chemical reagents, and provide high-precision biochemical analysis. They have extensive and important applications in the fields of biology, chemistry, and medical treatment. Microfluidic chip preparation technologies currently include photolithography technology, nanoimprint etching technology, femtosecond micromachining technology, etc. Among them, femtosecond micromachining technology is widely used because of its advantages of simplicity, speed, efficiency, and the ability to realize complex three-dimensional microchannels inside glass. [0003] There a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01L3/00
Inventor 周时凤于泳泽谌业勤张航邱建荣
Owner SOUTH CHINA UNIV OF TECH