Silicon-based ceramic surface metallization method
A ceramic surface and metallization technology, which is applied in metal processing equipment, welding media, welding/cutting media/materials, etc., can solve the problem of low connection strength and reliability between connecting components and silicon-based ceramics, high residual stress at the connection interface, and metal In order to improve the connection strength and connection reliability, easy and reliable connection, and high repeatability
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[0031] Specific embodiment 1: The method for metallizing the surface of silicon-based ceramics in this embodiment is implemented in the following steps:
[0032] Step 1: Preparation of Ti-Si alloy solder
[0033] According to weight percentage, weigh 72%~78% sponge Ti and the balance of single crystal Si, and put the weighed sponge Ti and single crystal Si into a non-consumable electric arc furnace for vacuum smelting until the solder has a uniform eutectic structure , Get Ti-Si alloy solder;
[0034] Step 2: Preparation of Ti-Si alloy solder sheet
[0035] Cut the Ti-Si alloy brazing filler metal obtained in step 1 into Ti-Si alloy brazing filler metal sheets with a thickness of 0.5 mm to 1 mm with a wire-cut EDM machine, and then double-cut the Ti-Si alloy brazing filler metal sheet with 1200# sandpaper. The surface is polished, and finally ultrasonically cleaned twice in acetone for 10-20 minutes each time;
[0036] Step three, silicon-based ceramic deoxidation treatment
[0037] Us...
Example Embodiment
[0045] Specific embodiment two: this embodiment is different from specific embodiment one in that in step one, 75% of sponge Ti and the balance of single crystal Si are weighed out by weight percentage. The other steps and parameters are the same as in the first embodiment.
Example Embodiment
[0046] Specific embodiment three: this embodiment is different from specific embodiment one or two in: the purity of sponge Ti mentioned in step one> 99.97%; the purity of the single crystal Si> 99.99%. The other steps and parameters are the same as in the first or second embodiment.
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