A kind of quartz glass cleaning method

A kind of quartz glass, the fourth technology, applied in cleaning methods and utensils, cleaning methods using liquids, chemical instruments and methods, etc., can solve the problem of poor optical quality and mechanical strength, inability to remove rubber stains, quartz glass Surface damage and other problems, to reduce crosslinking, avoid workpiece damage, and facilitate aging effects

Active Publication Date: 2018-03-02
航天科工惯性技术有限公司
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Problems solved by technology

[0003] In the prior art, the rubber stained on the surface of quartz glass is usually removed by chemical, physical or mechanical methods, but the rubber surface has strong self-adhesiveness due to the presence of free radicals, and spot stains are easy to clean during the cleaning process. It develops into flaky stains and cannot be effectively removed; the cleaning effect of mechanically removing rubber stains is poor, and it is easy to damage the surface of the quartz glass, with scratches or subsurface damage, which deteriorates the optical quality and mechanical strength; Chemical or physical cleaning methods, such as RCA method, light treatment, etc., cannot remove rubber stains

Method used

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  • A kind of quartz glass cleaning method

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[0034] The present invention will be described in detail below in conjunction with the accompanying drawings and specific examples.

[0035] The invention as figure 1 shown, through the following steps:

[0036] 1. Dip the quartz glass in acetone at 50°C for 5 hours; take out the quartz glass and rinse it with deionized water at room temperature for 3 times, each time for 5 minutes;

[0037] 2. Irradiate the quartz glass with a 100-watt ultraviolet low-pressure mercury lamp at normal temperature and pressure for 15 hours, and irradiate in a closed chamber that is impenetrable to ultraviolet rays. The distance between the workpiece and the low-pressure mercury lamp is 10 cm;

[0038] 3. Heat the quartz glass in the air at 400°C for 5 hours, and cool down naturally after the heat treatment;

[0039] 4. Put the quartz glass into H at 40°C 2 SO 4: In HF solution, apply ultrasonic vibration simultaneously, clean 20 minutes, the proportioning of described solution is H 2 SO 4 ...

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Abstract

The invention provides a quartz glass cleaning method. An organic solvent is adopted for heating and immersion cleaning, a low pressure mercury lamp is adopted for irradiation and heat treatment, a diluted H2SO4:HF solution is adopted for carrying out etching reaction on quartz glass, ultrasonic vibration is carried out, deionized water is adopted for carrying out high pressure spraying, all the treatment methods are organically combined, and precedence orders and optimal ranges of key technological parameters are determined, so that all the treatment methods coordinate with each other, the effect is taken to the utmost extent, and rubber pollution on the surface of the quartz glass is effectively removed.

Description

technical field [0001] The invention relates to a quartz glass cleaning method, which belongs to the technical field of optical instrument cleaning. Background technique [0002] Quartz glass has good low expansion characteristics, so it is widely used in precision optical devices, instruments and meters, and observation windows of various vacuum chambers. In the processing technology of quartz glass parts, the chemical corrosion method under the protection of rubber mask is often used to form a specific structure. The optical, electronic and other industries have high requirements on the surface quality of quartz glass parts, and no rubber residues are allowed on the surface of the processed parts. Contamination of the mask; as the observation window of the vacuum chamber, quartz glass is usually closely attached to the rubber sealing ring under a certain pressure difference. When replacing the sealing ring, it is necessary to remove the rubber stains on the window to ensur...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B11/00B08B3/02B08B3/08B08B3/12B08B7/00
CPCB08B3/02B08B3/08B08B3/12B08B7/00B08B7/0035B08B7/0071B08B11/00
Inventor 秦淑斌袁枫江安然吴艳魏超刘洋隗春燕
Owner 航天科工惯性技术有限公司
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