Preparation method of low-aged-rate 49S quartz crystal resonator

Abstract

The invention discloses a preparation method of a low-aged-rate 49S quartz crystal resonator which is high in product yield and stability and long in service lifetime. The method comprises the following steps of: a, grinding a quartz wafer; b, carrying out edge chamfering on the quartz wafer; c, carrying out fine grinding on the quartz wafer after the edge chamfering; d, carrying out annealing in a baking box under the temperature of 180-220 DEG C, wherein the annealing time is 48-96 hours; e, calculating a return frequency, obtaining a suitable corrosion frequency according to the return frequency, and carrying out deep corrosion on the quartz wafer by an acidic solution, wherein the corrosion thickness is 0,12 mm; f, under a low vacuum condition, adopting nitrogen ions for carrying out bombardment on the surface of the quartz wafer; g, determining a film layer thickness according to the difference between the corrosion frequency of the quartz wafer and a crystal resonator frequency, then carrying out film plating, and forming a leading-out electrode; and h, mounting the quartz wafer after the film plating to a base, coating conducting resin, and carrying out high temperature solidification.

Description

technical field [0001] The invention relates to a preparation method of a 49S quartz crystal resonator with low aging rate. Background technique [0002] Quartz crystal resonator, also known as quartz crystal, is a resonant element made of the piezoelectric effect of quartz crystal. It is used together with semiconductor devices and resistance-capacitance elements to form a quartz crystal oscillator. 49S quartz crystal resonators are often used on integrated circuit boards. This type of quartz crystal resonators has a high aging rate. The aging rate means that the frequency and resistance value will change over time. This change exceeds a certain range, it will cause the oscillating circuit to not work, and the whole machine will be defective, generally at the level of 5PPM. For the use environment with small tolerances, it cannot match the whole machine well, the market defect rate is relatively high, and the product life is short. There are certain deficiencies. Content...

AI Technical Summary

Problems solved by technology

49S quartz crystal resonators are often used on integrated circuit boards. The aging rate of this type of quartz crystal resonators is high. The aging rate means that the frequency and resistance value will change over time. This change exceeds a certain The range will cause the oscillating circuit to not work, and the whole machine will be defective, generally at the level of 5PPM. For the use environment with small tolerances, it cannot match the whole machine well, the market defect rate is relatively high, and the service life of the product is short. there are certain shortcomings