An in-situ experimental platform for TEM/SEM force and thermal coupling field loading
A scanning electron microscope and experimental platform technology, which is used in material analysis using radiation, material analysis using wave/particle radiation, measurement devices, etc. Realize problems such as crystal samples, and achieve the effect of realizing large displacement deformation experiments, reducing thermal drift, and fast heating rate
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[0031] Below in conjunction with accompanying drawing, the present invention is further described:
[0032] An in-situ experimental platform for transmission / scanning electron microscopy force-thermal coupling field loading, which is characterized in that it includes six parts: a substrate, a heating area, a mass block, a heat sink beam 5, a driving beam 6, and a displacement calibration beam; wherein, the lining The bottom is used to carry the pressure welding area, connect the supporting mass and the heating area; the heating area is two triangular flat plates, located in the central area of the device, one end of the heating area is loaded with samples, and the other end is connected to the mass block. Temperature resistance; two sets of driving beams are respectively located at the end of the opposite side of the mass block and the heating area, and are driven by electrothermal driving beams; the mass block is two rectangular flat plates connected to the heating area, hea...
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