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Metal etching processing technology stable in product quality

A metal etching and product quality technology, applied in the field of metal etching, can solve the problems of consistent metal film, unstable product quality, insufficient metal film etching, etc., achieve high processing efficiency, reduce unstable quality of etching process, and improve quality stability Effect

Inactive Publication Date: 2016-03-30
NINGBO DONGSHENG INTEGRATED CIRCUIT ELEMENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in the batch processing process, the thickness of the metal film on each substrate cannot be exactly the same. If each substrate is etched with the same etching time, the thinner metal film will inevitably be over-etched, and the thicker metal film will be over-etched. The metal film is not etched enough, resulting in unstable product quality

Method used

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Embodiment Construction

[0018] The technical solutions of the present invention will be further described in detail below in conjunction with specific embodiments.

[0019] A metal etching process with stable product quality, the steps are as follows:

[0020] 1) Coating photosensitive material on the surface of the metal film, and pasting film on the photosensitive material;

[0021] 2) Exposure treatment is carried out, and the film is removed after exposure, and the uncured photosensitive material on the surface of the metal film is cleaned, and the photosensitive material cured on the surface of the metal film forms a mask layer;

[0022] 3) Put the metal film in the etching machine for etching, obtain the etching end time of each metal film being etched through the end detection machine, and send the etching end time to the etching machine, and the etching machine passes the preset time according to the etching end time The algorithm obtains the overetching time of each metal film, and the etch...

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PUM

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Abstract

The invention discloses a metal etching processing technology stable in product quality. The metal etching processing technology includes the following steps that 1, the surfaces of metal films are coated with photosensitive materials, and films are pasted to the photosensitive materials; 2, exposure processing is carried out, the films are removed after exposure, the non-cured photosensitive materials on the surfaces of the metal films are washed, and the photosensitive materials cured on the surfaces of the metal films form mask layers; 3, the metal films are arranged in an etching machine to be etched, a terminal point detecting machine obtains etching terminal time of the metal films being etched and transmits the etching terminal time to the etching machine, and the etching machine obtains over-etching time of the metal films with a preset algorithm according to the etching terminal time and continues to etch the metal films for the over-etching time to complete etching of the metal films; 4, the mask layers on the etched metal films are removed, and washing is carried out; and 5, inspection and storage are carried out. The metal etching processing technology is simple in process, convenient to operate and high in processing efficiency, and the quality stability of products is guaranteed.

Description

technical field [0001] The invention relates to the technical field of metal etching, in particular to a metal etching process with stable product quality. Background technique [0002] Metal etching is also called photochemical metal etching, which refers to removing the protective film of the metal etching area after exposure plate making and development, and contacting chemical solution during metal etching to achieve the effect of dissolution and corrosion, forming concave-convex or hollow-out molding effects. This process can be used to manufacture copper plates, zinc plates and other printing concave-convex plates at the earliest, and is also widely used in the processing of weight-reducing instrument panels, nameplates and thin workpieces that are difficult to process by traditional processing methods; after continuous improvement and process equipment development, It can also be used in the processing of precision metal etching products for thin electronic parts in a...

Claims

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Application Information

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IPC IPC(8): C23F1/02
CPCC23F1/02
Inventor 王光强王满根郭永华尹国钦王仲斌管冬珠王彩萍
Owner NINGBO DONGSHENG INTEGRATED CIRCUIT ELEMENT
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