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Ceramic substrate and preparation method thereof, and power module

A technology of ceramic substrate and ceramic slurry, applied in ceramic layered products, chemical instruments and methods, layered products, etc., can solve the problems of high cost, application limitation, large thermal resistance, etc., and achieve high density and wide application. , the effect of high strength and toughness

Active Publication Date: 2016-04-06
BYD CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The invention solves the technical problems of high cost, large thermal resistance and strong toxicity of ceramics commonly used in DBC substrates in the prior art, which greatly restricts its application, and provides a new type of ceramic substrate

Method used

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  • Ceramic substrate and preparation method thereof, and power module
  • Ceramic substrate and preparation method thereof, and power module
  • Ceramic substrate and preparation method thereof, and power module

Examples

Experimental program
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preparation example Construction

[0022] The present invention also provides a preparation method for the ceramic substrate, comprising the following steps: preparing a core layer green body and a surface layer green body by tape casting; stacking the surface layer green body on both sides of the core layer green body, followed by isostatic pressing The glue is sintered to obtain the ceramic substrate.

[0023] In the present invention, the method used to prepare the green body is tape casting, and the equipment and process conditions of the tape casting are well known to those skilled in the art. ceramic paste.

[0024] Specifically, the core layer of the ceramic substrate is zirconia toughened alumina ceramics, so the core layer ceramic slurry used to prepare the core layer green body by tape casting contains zirconia, alumina, binder, dispersant, plasticizer, etc. agents and solvents. The surface layer of the ceramic substrate is alumina ceramics, so the surface ceramic slurry used to prepare the surface ...

Embodiment 1

[0037] (1) Preparation of ceramic slurry

[0038] Weigh Al according to the composition in Table 2 2 o 3 The required components of the slurry, ball mill ceramic powder, solvent and dispersant in a planetary ball mill for 4 hours, then add binder and plasticizer, ball mill for another 8 hours, add defoaming agent, finally ball mill for 1 hour, vacuum degassing for 0.5 hours h, that is, to get Al 2 o 3 slurry.

[0039] Weigh the required components of the ZTA10 slurry according to the components in Table 2, ball mill the ceramic powder, solvent and dispersant in a planetary ball mill for 4 hours, then add binder and plasticizer, ball mill for another 8 hours, and add defoaming agent agent, and finally ball milled for 1 hour, vacuum defoaming for 0.5 hours, and the ZTA10 slurry was obtained.

[0040] (2) Preparation of ceramic green body

[0041] The ceramic slurry prepared in step (1) was respectively cast on the release film with a casting machine. The casting speed of t...

Embodiment 2

[0046] (1) Preparation of ceramic slurry

[0047] Weigh Al according to the composition in Table 2 2 o 3 The required components of the slurry, ball mill ceramic powder, solvent and dispersant in a planetary ball mill for 4 hours, then add binder and plasticizer, ball mill for another 8 hours, add defoaming agent, finally ball mill for 1 hour, vacuum degassing for 0.5 hours h, that is, to get Al 2 o 3 slurry.

[0048] Weigh the required components of the ZTA20 slurry according to the components in Table 2, ball mill the ceramic powder, solvent and dispersant in a planetary ball mill for 4 hours, then add binders and plasticizers, ball mill for another 8 hours, and add defoaming agent, and finally ball milled for 1 hour, vacuum defoaming for 0.5 hours, and the ZTA20 slurry was obtained.

[0049] (2) Preparation of ceramic green body

[0050] The ceramic slurry prepared in step (1) was respectively cast on the release film with a casting machine. The casting speed of the c...

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Abstract

The invention provides a ceramic substrate and a preparation method thereof. The ceramic substrate comprises surface layers and a core layer in an integrated structure, wherein the surface layers are symmetrically distributed at two sides of the core layer, the surface layers are made of alumina, the core layer is made of zirconia-toughened alumina, and the zirconia-toughened alumina chemically comprises more than 0 wt% and no more than 40 wt% of ZrO2 and no less than 60 wt% and less than 100 wt% of Al2O3. The invention also provides a power module using the ceramic substrate. The ceramic substrate provided by the invention uses alumina ceramic as the surface layers and zirconia-toughened alumina ceramic as the core layer, so the ceramic substrate has higher strength and toughness and can be extensively applied to the power module.

Description

technical field [0001] The invention belongs to the technical field of power modules, and in particular relates to a ceramic substrate, a preparation method thereof, and a power module. Background technique [0002] Today, with the rapid development of high technology, the high performance, high reliability and high density of electronic devices require that the substrate materials used must have good mechanical properties, electrical properties, heat dissipation properties and soldering properties. The key component used in the power module is the DBC (Direct Bonded Copper) substrate, which is a metal / ceramic bonded substrate. Its main features are high insulation withstand voltage, strong current carrying capacity, and high thermal conductivity. At present, ceramics commonly used in DBC substrates mainly include AlN, Al 2 o 3 , BeO, its performance and thickness are shown in Table 1 below. [0003] Table 1 [0004] . [0005] It can be seen from the above table 1 th...

Claims

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Application Information

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IPC IPC(8): B32B18/00C04B35/10
Inventor 林勇钊林信平
Owner BYD CO LTD
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