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High-purity precious metal evaporation material and preparation method thereof

A precious metal and high-purity technology, which is applied in the field of preparation of high-purity precious metal evaporation materials, can solve the problems of internal defects, low processing efficiency and poor surface quality, and achieve the effects of simplified operation, small loss and low energy consumption.

Inactive Publication Date: 2016-04-20
GRIKIN ADVANCED MATERIALS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a high-efficiency, short-flow method for preparing high-purity precious metal evaporation materials, which solves the problems of poor surface quality and internal defects caused by the defects of the aforementioned common melting and casting ingots during the preparation of evaporation materials, and at the same time Solve the problems of poor yield, large loss and low processing efficiency

Method used

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  • High-purity precious metal evaporation material and preparation method thereof
  • High-purity precious metal evaporation material and preparation method thereof
  • High-purity precious metal evaporation material and preparation method thereof

Examples

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Embodiment 1

[0035] Example 1 Preparation of high-purity gold evaporation material

[0036] Preparation of high-purity gold evaporation material, the process is as follows figure 1 As shown, the specific steps are as follows:

[0037] (1) Using high-purity gold raw materials with a purity ≥ 99.999%, the powder is pressed into blocks in advance and placed in a graphite crucible in the furnace chamber. The inner diameter of the selected water-cooled crystallizer is φ7mm and the length is 140mm;

[0038] (2) Vacuum the furnace chamber to ×10 -2 Above Pa; set the melt refining temperature to 1250°C, the casting temperature to 1200°C, and the crystallizer cooling water temperature to 30°C;

[0039] (3) Adjust the heating power to heat the raw material until all the metals in the crucible are melted;

[0040] (4) Increase the melt temperature in step (3) to 1250°C and keep it warm for 30 minutes to achieve full refining, degassing and impurity removal;

[0041] (5) Set the melt temperature i...

Embodiment 2

[0048] Embodiment 2 prepares high-purity silver evaporation material

[0049](1) Adopt block-shaped high-purity silver raw materials with a purity ≥ 99.99%, place them in a graphite crucible in the furnace chamber, and use a water-cooled crystallizer with an inner diameter of φ3mm and a length of 140mm;

[0050] (2) Vacuum the furnace chamber to ×10 -1 Above Pa; set the melt refining temperature to 1150°C, the casting temperature to 1100°C, and the crystallizer cooling water temperature to 50°C;

[0051] (3) Adjust the heating power to heat the raw material until all the metals in the crucible are melted;

[0052] (4) Increase the temperature of the melt in step (3) to 1150°C and keep it warm for 10 minutes to achieve full refining, degassing and impurity removal;

[0053] (5) Set the melt temperature in step (4) to 1100° C., turn off the vacuum pump system, and backfill the furnace chamber with argon as a protective gas. Drive the rod to move down intermittently, and stop ...

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Abstract

The invention discloses a high-purity precious metal evaporation material and a preparation method thereof. The method comprises the following steps: (1) high-purity precious metal serves as a raw material, and is refined by using vacuum inductive smelting to remove gas and impurities, wherein the purity of the raw material is above 99.99 wt.%; and (2) continuous casting is performed; a melt crystallized in a crystallizer is intermittently leaded out from the bottom of a crucible to obtain the high-purity precious metal evaporation material with a certain size; obtained wire can have multiple specifications, such as phi 3-12 mm; and if the length is demanded, the wire can be cut off according to use requirements. The method, adopted to prepare the high-purity precious metal evaporation material, has such advantages as high efficiency, short flow, low loss, low energy consumption and high precision; and according to the prepared high-purity precious metal evaporation material, impurity elements are fully removed, and the purity satisfies the high-purity metal standard requirement of above 99.99 wt.% to satisfy the performance requirements of the electronic information industry on preparation of high-quality films.

Description

technical field [0001] The invention relates to the field of metal material preparation and molding, in particular to a preparation method of a high-purity precious metal evaporation material required for preparing electronic thin film materials by physical vapor deposition (PVD). Background technique [0002] Electronic thin film materials are the basic elements of the electronic information industry, and their manufacturing level reflects the overall development status of the electronic information industry. Using physical vapor deposition (PVD), that is, using electron beams or heat sources to heat high-purity metal evaporation materials under vacuum conditions to transform them from solid to gaseous, form atoms and transport them in a straight line, and finally condense and deposit them on the substrate. On (silicon wafer) to form a thin film. [0003] High-purity precious metals refer to precious metals with a purity greater than 99.99wt.%. Due to the extremely low imp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24B22D11/116
CPCC23C14/24B22D11/116
Inventor 张巧霞张涛曹惠李勇军张春利贾存锋徐国进吕超
Owner GRIKIN ADVANCED MATERIALS
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