Manufacturing method of monolithic composite sensitive electrode, and sensitive device based thereon

Abstract

The invention discloses a single composite sensitive electrode and a manufacturing method thereof, and also discloses a sensitive device and an electrochemical accelerometer sensitive core based on the single composite sensitive electrode. The single composite sensitive electrode disclosed by the invention is manufactured on the basis of a silicon wafer; after processing is completed, the silicon wafer is provided with an anode face and a cathode face; the anode face is provided with an anode; and the cathode face is provided with a cathode. The electrochemical accelerometer sensitive core comprises two pairs of cathode and anode electrodes; in the assembling process, an O-shaped elastic sealing ring is placed between two single composite electrodes; and assembling of two pairs of cathode and anode electrodes is completed in a mechanical compressing sealing manner. By a method of integrating the cathode and anode electrodes into the same silicon wafer, not only can the number of the silicon wafers be greatly reduced so as to greatly reduce assembling difficulty, but also a spacing between the cathodes and the anodes can be conveniently changed so as to optimize device performance.

Description

technical field [0001] The invention relates to the technical fields of accelerometer and MEMS (micro-electro-mechanical system), in particular to a monolithic composite sensitive electrode based on MEMS technology and a manufacturing method thereof. Background technique [0002] Electrochemical accelerometer is a sensing device that converts external acceleration signals into electrical signals. Its sensitive element is a four-electrode structure, immersed in a mixed solution of iodine and potassium iodide, and the solution is contained in an elastic membrane sealed at both ends. pipe. The four electrodes are arranged in the order of anode-cathode-cathode-anode. During operation, an electrode reaction occurs with a fixed voltage applied to the anode and cathode. After a period of time, the reactive ions will form a stable concentration distribution. When the device is subjected to external acceleration, the electrolyte will be displaced relative to the electrode, resulting...

AI Technical Summary

Problems solved by technology

Some MEMS sensitive electrodes that have appeared in recent years have low sensitivity due to the small electrode area; some require as many as seven layers of silicon wafers for alignment and bonding, which is difficult and inefficient, and is not suitable for mass production.

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