A diversion device for polycrystalline ingot furnace

Abstract

The invention discloses a guide device for a polycrystal ingot casting furnace. The guide device comprises a matching shell and a guide shell which are connected axially, wherein the matching shell comprises a hollow matching shell part and a gas inlet table part; the inside of the shell wall of the matching shell part is provided with a first cushion chamber which has the same central line as the matching shell part and is provided with an opening on the lower end; a gas inlet is arranged in the gas inlet table part, and communicates with the first cushion chamber; the inside of the shell wall on the upper end of the guide shell is provided with a second cushion chamber corresponding to the first cushion chamber, which is provided with an opening on the upper end surface; the inside of the shell wall of the guide shell is provided with at least one gas guide duct which extends downwards from the lower end surface of the second cushion chamber along the cylindrical spiral line; and an outlet of each gas guide duct is positioned on the lower end of the guide shell. The guide device is provided with a viewing field which leads to the inside of the ingot casting furnace. The guide device can enable the carrier gas to be dispersedly blown to the liquid silicon, thereby increasing the contact surface between the carrier gas and liquid silicon, and reducing the regional supercooling caused by the carrier gas and the formation of impurities promoted by the carrier gas. Meanwhile, a rotational flow field is generated when the carrier gas drives the liquid silicon, thereby promoting the volatilization of impurities.

Description

technical field [0001] The invention relates to a flow guide device, in particular to a flow guide device for guiding the flow direction of a carrier gas used in a polycrystalline ingot furnace, and belongs to the field of crystal growth equipment. Background technique [0002] The polycrystalline ingot casting furnace 10 is mainly composed of an infrared detector 16, a furnace body 11, a flow guiding device 12, a heat insulation cage 13, a heater 14, and a graphite platform 15, such as figure 1 shown. The flow guiding device 12 includes a graphite tube 123 , a coupling nut 121 and a flow guiding tube 122 . The upper end of the guide tube 122 is provided with an external thread that matches the internal thread of the fitting nut 121, and the upper end of the guide tube 122 passes through the through hole in the middle of the top insulation board of the heat insulation cage, and the matching hole above the top insulation board. The nut 121 is fixed, and the lower end of the...

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Problems solved by technology

In order to overcome the problems existing in the application of the flow guide device in the prior art: the carrier gas is concentratedly blown on a certain area on the surface of the liquid silicon, and the carrier gas takes away a large amount of heat from this area, causing the local supercooling of the liquid silicon in this area, which promotes The nucleation and growth of impurities in liquid silicon; the field of view leading to the ingot furnace in the diversion device is completely blocked, and the state of the ingot furnace cannot be observed through the observation window through the diversion device, which is inconvenient for the furnace operation; the crystal rod cannot It cannot be inserted into the ingot furnace through the diversion device, and the crystal growth rate is inconvenient to measure; the infrared detector cannot detect the state of the silicon material in the furnace, and the automatic crystal growth process cannot be carried out normally

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