A Design Method for Field Focusing of Hundred-Nanoscale Ultra-fine Light Needle

A nanoscale, design method technology, applied in optics, optical components, instruments, etc., can solve the problem that the needle field is on the side of the incident light field, and relies on ultra-precision aspheric surface processing technology, and the radial polarization vector beam generation system is complex , high cost of high-end apochromatic microscope objectives, etc., to achieve the effect of flexible design method, light structure and low cost
CN105629461BActive Publication Date: 2017-12-26XI AN JIAOTONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
XI AN JIAOTONG UNIV
Publication Date
2017-12-26

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Abstract

The invention discloses a field focusing design method of a hundred nanometer scale ultra-fine light needle, which belongs to the technical field of nanophotonics focusing and micromachining. The diffraction propagation behavior of the subsequent light field when the metal film ring plate is structured; second, use the equivalent numerical aperture NAeq and the normalized central occlusion factor ε to constrain the lateral scale of the focused beam, and introduce super-Gaussian function constraints in the axial direction to form a super Fine light needle field, thus establishing a nonlinear constrained optimization model; third, use the configured genetic algorithm and fast Hankel transformation algorithm to program and solve the above optimization model; fourth, set the initial parameters for optimization, including structural parameters and algorithm parameters, Execute the optimization algorithm multiple times, and optimize the microstructured metal film ring belt. Based on the present invention, different polarized light beam illuminations and multi-scale microstructure metal film annular strips can be flexibly designed, which can be applied to realize micro-nano lithography, nano-printing, super-resolution microscopic imaging, etc.
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Description

technical field

[0001] The invention belongs to the technical field of nano-photonics focusing and micro-processing, and in particular relates to a method for designing ultra-fine light needle field focusing at a hundred nanometer scale. Background technique

[0002] Since 2008, the field focusing problem of ultra-fine optical needles has attracted widespread attention from the scientific community, and has become one of the international frontier hot research topics. The ultra-fine optical needle field has important engineering application value, such as in the fields of laser direct writing microlithography, optical data storage, scanning optical nano-microscopy, atomic optics, microscopic particle acceleration, optical manipulation and other fields.

[0003] At present, the field focusing modulation methods of ultra-fine light needles are mainly divided into three categories, which are based on refractive optical systems, reflective optical systems and diffractive optical...

Claims

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