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Manufacturing method of platinum film thermal resistor

A technology of thin film thermistor and manufacturing method, which is applied in the direction of resistance manufacturing, resistors, coating resistance materials, etc., can solve the problems of high production cost of platinum resistors, poor resistance value accuracy, and large product volume, so as to reduce production costs , Improve production efficiency, improve the effect of resistance value accuracy

Inactive Publication Date: 2016-06-01
CHINA ZHENHUA GRP YUNKE ELECTRONICS
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Problems solved by technology

Therefore, there are defects such as high production cost, low production efficiency, large product volume, and poor resistance value accuracy in the production of platinum resistors by thick film printing technology.

Method used

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  • Manufacturing method of platinum film thermal resistor
  • Manufacturing method of platinum film thermal resistor

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Embodiment Construction

[0030] The present invention will be further described below in conjunction with specific embodiments: a manufacturing method of a platinum thin-film thermistor, including ceramic substrate polishing, platinum film layer sputtering, film layer heat treatment, plasma etching, laser digital resistance adjustment, Resistor body encapsulation, sintering, manual splitting, lead welding, solder joint encapsulation and encapsulation layer curing; the specific methods are as follows:

[0031] 1) The upper and lower surfaces of the 99 ceramic substrate are polished, and the surface roughness is controlled at 0.10 μm to 0.15 μm;

[0032] 2) Soak the polished ceramic substrate with 5% NaOH solution for 15 minutes, and ultrasonically clean the substrate 3 times with deionized water for 5 minutes each time, remove the remaining NaOH solution on the substrate, and dry it with compressed air Water drops on the surface of the substrate, and the substrate was dried in an oven at 150°C for 60 m...

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Abstract

The invention discloses a manufacturing method of a platinum film thermal resistor, and belongs to the manufacturing method of a chip film resistor. The manufacturing method comprises a ceramic substrate polishing step, a platinum film layer sputtering step, a film layer heat treatment step, a plasma etching step, a digital laser trimming step, a resistor body encapsulating step, a sintering step, a manual splitting step, a lead welding step, a welding spot encapsulating step and an encapsulated layer solidifying step. The manufacturing method has the advantages of low production cost, high production efficiency, small product volume, high resistance value precision and the like, and is an ideal method for producing the platinum film thermal resistor on a large scale.

Description

technical field [0001] The invention relates to a resistor, in particular to a method for manufacturing a platinum thin film thermistor. Background technique [0002] Platinum thin film thermistor has the characteristics of small size, high temperature measurement accuracy, good thermal stability, wide temperature measurement range, fast thermal response time, acid and alkali corrosion resistance, etc., so it is widely used in industrial precision temperature measurement and precise temperature control And precise temperature display instrumentation field. [0003] The traditional manufacturing method of platinum resistors is obtained by printing platinum paste on ceramic substrates through thick film printing technology, performing serpentine resistance adjustment by laser, and screen printing secondary glass. During the screen printing process, a large amount of platinum paste will adhere to the screen frame and the squeegee. After the screen printing is completed, cleani...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01C17/12H01C17/065H01C17/06
CPCH01C17/06H01C17/065H01C17/12
Inventor 袁敏生韩玉成朱雪婷陈思纤
Owner CHINA ZHENHUA GRP YUNKE ELECTRONICS
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