A multispectral phase metasurface device
A metasurface and phase-type technology, applied in the field of metamaterials, can solve problems such as complex optical systems, and achieve the effect of simple and compact structure, favorable processing and light weight
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Embodiment 1
[0037] Embodiment 1 of the present invention takes the preferred elliptical nanopore unit structure as an example, such as figure 1 As shown, the multi-spectral phase metasurface device includes a substrate 1, a metasurface layer 2, and nanopores 3 etched in the metasurface layer arranged in sequence from bottom to top. Wherein the thickness of the substrate is h; the thickness of the supersurface layer is d; the total thickness of the material is t; the characteristic size w (short axis) of the nanopore structure is not equal to l (long axis). According to this structure, its design principle will be described in detail below.
[0038] Under the incidence of circularly polarized light CPL, each nanopore acts as a polarizing filter, so the spatially varying array of holes produces spatially varying polarization states. Polarization state changes are related to phase changes due to photon spin-orbit interactions. The transmitted light will produce a phase delay of 2σα, where ...
Embodiment 2
[0055] Focusing and imaging of different wavelengths at the same position is realized by using a multi-spectral phase metasurface device. According to the above design theory, assuming that there are several point light sources with different wavelengths at the same position, their phase distribution on the metasurface can be expressed as:
[0056]
[0057] For simplicity, it is assumed that the amplitudes of these sources are equal. In the process of processing and designing the metasurface, this embodiment uses three different wavelengths of 532nm, 632.8nm and 785nm. The circular sample radius is designed to be 10 μm, and the focal length is f=9 μm. Figure 10 is the SEM image of the sample, in which the nanopore arrays are arranged according to C6 symmetry. The metasurface was simulated and tested under the incident conditions of three different wavelengths. Figure 11 The left column is the numerical calculation results of the xoz plane intensity under the incident c...
Embodiment 3
[0060] The multi-spectral phase-type metasurface device is used to realize the focusing of light waves with different wavelengths and different angles incident at the same position. Different from Embodiment 2, in this embodiment, light waves incident at different angles are used to focus at the same position, and the phase distribution of the corresponding metasurface can be expressed as:
[0061]
[0062] where kxn and kyn are the transverse wave vectors of the nth inclined incident electromagnetic wave in the x and y directions. In this embodiment, it is assumed that the amplitudes of these light sources are equal, and three different wavelengths of 532nm, 632.8nm and 785nm are used, and the corresponding incident angles are 0°, 30° and -30° (the incident planes are all xoz planes), and the focal length is 50 μm , with an aperture of 100 μm. See the result Figure 13 ,in, Figure 13 (a) is a wavelength of 532nm, an incident angle of 0 ° light intensity distribution di...
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