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Self-adjustment magnetorheological flexible polishing abrasive wheel and polishing method thereof

A flexible polishing and magnetorheological technology, applied in the direction of wheels, abrasives, metal processing equipment, etc. of flexible working parts, can solve the problems of fast wear and high cost of Poligrind, and achieve the effect of avoiding damage and restoring shape in real time

Active Publication Date: 2016-07-06
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the invention is to propose a self-repairing magnetorheological flexible polishing wheel for the high cost and fast wear of Poligrind

Method used

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  • Self-adjustment magnetorheological flexible polishing abrasive wheel and polishing method thereof
  • Self-adjustment magnetorheological flexible polishing abrasive wheel and polishing method thereof
  • Self-adjustment magnetorheological flexible polishing abrasive wheel and polishing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] Such as Figure 1 to Figure 5As shown, a self-dressing magneto-rheological flexible polishing wheel of the present invention includes a fixed ring 1, an internal gear 3, a grinding wheel ring 8, a gear shaft 11, a synchronous rotating gear 17, a planetary gear 18, a rotating shaft 25 and a cylinder Permanent magnet 26, wherein the rotating shaft 25 is installed in the grinding wheel ring 8, the cylindrical permanent magnet 26 is installed in the through hole provided at the lower end of the rotating shaft 25, the internal gear 3 is installed on the top of the grinding wheel ring 8, and the fixed ring 1 Installed on the top of the internal gear 3, and the fixed ring 1 is fixed on the machine tool, the grinding wheel interface 13 is installed on the top of the grinding wheel ring 8 and the fixed ring 1, the grinding wheel interface 13 is connected with the grinding wheel ring 8, and the grinding wheel interface 13 is provided with an external Gear, the gear shaft 11 is in...

Embodiment 2

[0049] Such as Figure 1 to Figure 5 As shown, a self-dressing magneto-rheological flexible polishing wheel of the present invention is the same as that of Embodiment 1.

[0050] Such as Figure 6 Shown, the grinding and polishing method of self-repairing magneto-rheological flexible polishing emery wheel of the present invention, comprises the steps:

[0051] 1) According to the structure of the VG401MKII grinding machine produced by Okamoto Company, the design is as follows Figure 1 to Figure 5 Adapted self-dressing magneto-rheological flexible polishing wheel structure;

[0052] 2) According to the characteristics of the 6-inch single crystal Si substrate, the selected cylindrical permanent magnet 26 with a magnetic field strength of 3800Gs is installed adjacent to the same magnetic pole in the self-tuning magnetorheological flexible polishing wheel, and the rotation axis 25 is adjusted so that the cylindrical permanent magnet The distance from the lower end surface of ...

Embodiment 3

[0060] Such as Figure 1 to Figure 5 As shown, a self-dressing magneto-rheological flexible polishing wheel of the present invention is the same as that of Embodiment 1.

[0061] Such as Figure 6 Shown, the grinding and polishing method of self-repairing magneto-rheological flexible polishing emery wheel of the present invention, comprises the steps:

[0062] 1) According to the structure of LapmasterSFT Corp.'s DMG-6011V vertical single-axis ultra-precision precision end grinder machine tool, the design is as follows Figure 1 to Figure 5 Adapted self-dressing magneto-rheological flexible polishing wheel structure;

[0063] 2) According to the characteristics of the 4-inch single crystal sapphire substrate, the selected cylindrical permanent magnet 26 with a magnetic field strength of 4500Gs is installed adjacent to the same magnetic pole in the self-tuning magnetorheological flexible polishing wheel, and the rotation axis 25 is adjusted to make the cylindrical permanent m...

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Abstract

The invention relates to a self-adjustment magnetorheological flexible polishing abrasive wheel and a polishing method thereof. The self-adjustment magnetorheological flexible polishing abrasive wheel comprises a fixing ring, an inner gear, an abrasive wheel ring, a gear shaft, a synchronous rotation gear, a planetary gear, a rotary shaft and a cylinder permanent magnet. The rotary shaft is arranged in the abrasive wheel ring. The cylinder permanent magnet is arranged in a through hole formed in the lower end of the rotary shaft. The inner gear is arranged on the upper portion of the abrasive wheel ring. The fixing ring is arranged at the top of the inner gear and fixed to a machine tool. An abrasive wheel connector is arranged at the top of the abrasive wheel ring and the top of the fixing ring. The abrasive wheel connector is connected with the abrasive wheel ring. An outer gear is arranged on the abrasive wheel connector. The gear shaft is arranged on the abrasive wheel connector. The planetary gear is arranged on the gear shaft. The synchronous rotation gear is arranged at the upper end of the rotary shaft. The planetary gear is engaged with the outer gear arranged on the abrasive wheel connector. The synchronous rotation gear and the planetary gear are engaged with the inner gear. According to the self-adjustment magnetorheological flexible polishing abrasive wheel and the polishing method thereof, replacing and self-sharpening of abrasive materials and real-time recovery of the shape of an abrasive wheel block are achieved, and the self-adjustment magnetorheological flexible polishing abrasive wheel and the polishing method thereof are suitable for efficient, super-smooth and uniform grinding and polishing of planes of photoelectronic / microelectronic substrates and optical elements.

Description

technical field [0001] The invention relates to a self-repairing magnetorheological flexible polishing wheel and a grinding and polishing method thereof, which is particularly suitable for ultra-precision grinding and polishing of optoelectronic / microelectronic semiconductor substrates and optical elements, and belongs to the technical field of ultra-precision processing. Background technique [0002] In the LED field, single crystal silicon (Si), single crystal germanium (Ge), gallium arsenide (GaAs), single crystal silicon carbide (SiC) and sapphire (Al 2 o 3 ) etc., as semiconductor substrate materials, also require an ultra-flat and ultra-smooth surface (roughness Ra below 0.3nm) to meet the requirements of epitaxial film growth, and require no defects and no damage. As one of the core components of optical devices, in order to achieve good optical performance, the surface precision of optical components needs to be ultra-smooth (roughness Ra should be less than 1nm), a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B1/00B24D13/00
CPCB24B1/005B24D13/00
Inventor 潘继生阎秋生张凤林
Owner GUANGDONG UNIV OF TECH
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