An ultra-clean gas delivery and transfer pump

Abstract

The invention discloses a transporting and shifting pump for ultraclean gas. The transporting and shifting pump is designed on the basis of the fundamental principles of liquid ring pumps and comprises a base, a motor, a pump body, a hydrargyrum backflow collector and a hydrargyrum steam remover, wherein the motor is installed on the base, the pump body is connected to the motor, and the hydrargyrum backflow collector and the hydrargyrum steam remover are sequentially connected to the pump body; the motor drives the pump body to suck the ultraclean gas into a gas inlet of the pump body; the hydrargyrum backflow collector and the hydrargyrum steam remover are used for removing hydrargyrum steam of a small amount in transported gas; the motor drives an impeller of the pump body to rotate at a high speed and suck and exhaust the transported gas, and the hydrargyrum backflow collector and the hydrargyrum steam remover are used for removing the hydrargyrum steam of a small amount in the transported gas at the same time. The transporting and shifting pump is scientific and reasonable in design, and the pump body is simple in structure, light in weight, low in operation noise and small in vibration. The transporting and shifting pump is suitable for transporting and shifting ultraclean hydrogen, isotopic gas of the hydrogen and inert gas, can shift the transported gas efficiently and can meet the special requirements of different application fields of the domestic chemical industry and the atomic energy industry.

Description

technical field [0001] The invention relates to the field of vacuum technology, in particular to an ultra-clean gas delivery and transfer pump. Background technique [0002] Electronic industries such as integrated circuits and chip manufacturing require an ultra-clean space environment, and also need to transport or extract ultra-clean working gas to the working chamber. The nuclear industry also needs to deal with the treatment of gases containing radioactive substances; pumps for gas delivery, transfer or evacuation There are many types, including scroll pumps, plunger pumps, liquid ring pumps, diaphragm pumps, and swing pumps. These pumps have been widely used in many industrial fields for transporting different types of gas or liquid substances, but for some special For the transportation of substances, such as radioactive gas and ultra-clean gas, the above-mentioned types of pumps have some fatal shortcomings to varying degrees, and cannot fully meet the requirements o...

AI Technical Summary

Problems solved by technology

[0002] Electronic industries such as integrated circuits and chip manufacturing require an ultra-clean space environment, and also need to transport or extract ultra-clean working gas to the working chamber. The nuclear industry also needs to deal with the treatment of gases containing radioactive substances; pumps for gas delivery, transfer or evacuation There are many types, including scroll pumps, plunger pumps, liquid ring pumps, diaphragm pumps, and swing pumps. These pumps have been widely used in many industrial fields for transporting different types of gas or liquid substances, but for some special For the transportation of substances, such as radioactive gas and ultra-clean gas, the above-mentioned types of pumps have some fatal shortcomings to varying degrees, and cannot fully meet the requirements of the use environment; the most typical feature is that the gas being transported is easily polluted by hydrocarbon substances, and hydrocarbon substances are mainly It comes from the lubricating oil between the high-speed rotating bearing and the shaft of the pump, or from the shaft sealing packing. These materials usually also contain hydrocarbons. Hydrocarbons are usually the main pollution source of ultra-clean gas. When the gas to be transported is When the radioactive gas is contained, the radiation damage of the organic material by the ray will lead to a decrease in the sealing performance of the material, so the organic sealing material cannot be used; these pumps also have a common disadvantage that the pressure at the suction end is high, and they cannot meet the suction pressure at the same time. The requirements of low pressure and high exhaust pressure cannot meet the requirements of complete transfer of the target container gas; the French swing pump is a high-purity gas transfer and transfer pump. The entire pump unit is oil-free and does not contain organic materials, and the output pressure reaches 0.7MPa , the import limit pressure is less than 50Pa, it is widely used as the transfer and transportation of gases containing radioactive substances, and is widely used in the field of atomic energy industry, but the price of this type of imported pump unit is very high, economically uneconomical, and technically embargoed abroad; although the diaphragm pump It can meet the requirements of clean gas circulation, but due to the high pressure at the suction end, the gas transfer efficiency is low; liquid ring pumps use water as the working medium, and are widely used in vacuuming in the chemical and food industries. Liquid ring pumps rely on the volume of the pump chamber The impeller of the liquid ring pump is installed eccentrically in the pump body. When the impeller rotates, the liquid working medium entering the pump body of the water ring pump is thrown around by the impeller. Due to the centrifugal force The liquid medium forms a closed water ring of equal thickness similar to the shape of the pump cavity. The upper inner surface of the water ring is just tangent to the impeller hub, and the lower inner surface of the water ring is just in contact with the top of the blade.

At this time, a crescent-shaped space is formed between the hub of the impeller and the water ring, and this space is divided into several small cavities equal to the number of blades by the impeller; At 180°, the volume of the small cavity gradually increases from small to large, and the pressure decreases continuously, and it communicates with the air inlet on the suction and exhaust plate. When the pressure in the small cavity is lower than the pressure in the pumped container, according to the gas The principle of pressure balance, the pumped gas is continuously pumped into the small cavity, and it is in the process of inhalation at this time; when the inhalation is completed, it is isolated from the air inlet, from the section from II-II to III-III, the volume of the small cavity It is gradually decreasing, and the pressure is constantly increasing. At this time, it is in the process of compression. When the compressed gas reaches the exhaust pressure in advance, it will be exhausted in advance from the auxiliary exhaust valve; from section III-III to I-I, and with The volume of the small cavity connected to the exhaust port is further reduced and the pressure is further increased. When the pressure of the gas is higher than the exhaust pressure, the compressed gas is discharged from the exhaust port. During the continuous operation of the pump, the The process of suction, compression and exhaust is carried out, so as to achieve the purpose of continuous pumping. However, due to the high vapor pressure of water at room temperature, the suction pressure of the water ring pump is also high, so it can only be used as an initial vacuum. The transported gas of the type pump will be polluted by water vapor; therefore, it is necessary to develop a safe and reliable new pump that can meet the requirements of ultra-clean, radioactive gas transfer and transportation, and has a large flow rate.

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