Single-grain continuous scratching interference behavioral testing method for spherical grinding head pre-maintenance rigid and brittle test piece
A technology for spherical grinding heads and hard and brittle test pieces, which is applied to measuring devices, instruments, and mechanical devices. Interference between abrasive particles and other issues can be achieved to achieve high-speed and high-precision scratch testing, avoid large end face runout or radial runout, and improve shape accuracy and surface finish.
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Embodiment 1
[0037] A test method for the continuous scratching interference behavior of a single abrasive particle of a spherical grinding head pre-repaired hard and brittle specimen, the adopted device includes:
[0038] In the machine tool, the disc-shaped hard and brittle specimen 1 is mounted on the electric spindle of the machine tool through the vacuum suction cup 2, and the specimen 1 can be rotated by the electric spindle;
[0039] Dynamic balance instrument, used for online dynamic balance of test piece 1;
[0040] The spherical grinding head 6 is used to repair the end surface of the test piece 1; the spherical grinding head 6 is detachably attached to the bracket and movably attached to the machine tool through the bracket; the axis of the spherical grinding head 6 is parallel to the test piece 1 axis of rotation;
[0041] The tool head 3 is used for the scratch test; the top of the tool head 3 is fixed with a single abrasive grain; the tool head 3 can be replaced with the spherical gr...
Embodiment 2
[0063] 1) Fix the 6-inch sapphire wafer (about 150mm in diameter) on the electric spindle of the machine tool with a vacuum chuck 2. The test piece 1 can be rotated by the electric spindle; use a dynamic balancer on the test piece 1 Perform on-line dynamic balance to reduce the vibration of specimen 1 during high-speed rotation, so as to ensure that the abrasive particles and specimen 1 can stably contact during the scratching process;
[0064] 2) Use a spherical grinding head 6 to repair the test piece 1, first roughing, and then finishing, to form a ring-shaped repairing area with an end runout of 3μm and an average surface roughness of Ra10nm on the surface of the test piece 1. 4. To reduce the runout of the end face of the test piece 1, improve the surface quality, and further ensure that the abrasive particles and the test piece 1 can be stably contacted during the scratching process; the specific steps are as follows:
[0065] 2-1) Spherical grinding head rough machining and ...
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