Preparation method of electrolyte thin film for all-solid-state thin-film lithium ion battery

An electrolyte film and lithium-ion battery technology, applied in the field of electrolyte film preparation, can solve problems such as restricting the development of all-solid-state thin-film lithium-ion batteries, and achieve the effects of good thermodynamic stability, small size and long service life

Inactive Publication Date: 2016-07-13
惠州市佰特瑞科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, there are few electrolyte systems that can meet the above requirements at the same time, which limits the development of all-solid-state thin-film lithium-ion batteries.

Method used

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  • Preparation method of electrolyte thin film for all-solid-state thin-film lithium ion battery
  • Preparation method of electrolyte thin film for all-solid-state thin-film lithium ion battery
  • Preparation method of electrolyte thin film for all-solid-state thin-film lithium ion battery

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Embodiment 1

[0022] The present invention relates to a kind of preparation method of electrolyte film for all-solid-state thin-film lithium-ion battery, and it comprises the following steps of carrying out successively:

[0023] ①, using radio frequency magnetron sputtering method, using Li 3 PO 4 The target requires a relative density greater than 99%, a purity greater than 99.9%, a diameter of 60mm, and a thickness of 6mm; after the target and substrate are installed, close the sputtering chamber and evacuate the sputtering chamber to 1.0×10 -4 Pa, filled with a mixed gas of helium and hydrogen at 1 atmospheric pressure (in the mixed gas, the volume ratio of helium to hydrogen is 0.2:1), and then the indoor gas pressure is pumped to 1.2Pa;

[0024] ② Pre-sputtering to clean the oxide layer and impurities on the target surface;

[0025] ③. Set the sputtering power to 3W / cm 2 , the distance between the target and the base is 60 mm, and the sputtering time is 4 ho...

Embodiment 2

[0033] The invention relates to a method for preparing an electrolyte film for an all-solid-state thin-film lithium-ion battery. The specific preparation process is as follows:

[0034] ①, using radio frequency magnetron sputtering method, using Li 3 PO 4 The target requires a relative density greater than 99%, a purity greater than 99.9%, a diameter of 60mm, and a thickness of 6mm; after the target and substrate are installed, close the sputtering chamber and evacuate the sputtering chamber to 1.0×10 -4 Pa, filled with a mixed gas of helium and hydrogen at 1 atmospheric pressure (in the mixed gas, the volume ratio of helium to hydrogen is 0.8:1), and then the indoor gas pressure is pumped to 1.5Pa;

[0035] ② Pre-sputtering to clean the oxide layer and impurities on the target surface;

[0036] ③. Set the sputtering power to 4W / cm 2 , the distance between the target and the base is 60 mm, and the sputtering time is 5 hours to form a LiPON thin film;...

Embodiment 3

[0040] The invention relates to a method for preparing an electrolyte film for an all-solid-state thin-film lithium-ion battery. The specific preparation process is as follows:

[0041] ①, using radio frequency magnetron sputtering method, using Li 3 PO 4 The target requires a relative density greater than 99%, a purity greater than 99.9%, a diameter of 60mm, and a thickness of 6mm; after the target and substrate are installed, close the sputtering chamber and evacuate the sputtering chamber to 1.0×10 -4 Pa, filled with a mixed gas of helium and hydrogen at 1 atmospheric pressure (in the mixed gas, the volume ratio of helium to hydrogen is 0.3:1), and then pump the indoor gas pressure to 2Pa;

[0042] ② Pre-sputtering to clean the oxide layer and impurities on the target surface;

[0043] ③. Set the sputtering power to 5W / cm 2 , the target base distance is 60mm, and the sputtering time is 6 hours to form a LiPON thin film;

[0044] ④. Turn off the...

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Abstract

The invention relates to a preparation method of an electrolyte thin film for an all-solid-state thin-film lithium ion battery.The electrolyte thin film is an amorphous lithium phosphorus oxynitride thin film.The preparation method adopts a radio frequency magnetron sputtering process.The LiPON thin film prepared according to the method is amorphous, larger than 2*10<-6>S/cm in ionic conductivity and excellent in electrochemical performances such as high thermodynamic stability and large electrochemical window width, thereby being an ideal solid electrolyte material and especially suitable for production of the all-solid-state thin-film lithium ion battery small in size, high in energy density and long in service life.

Description

technical field [0001] The invention relates to a method for preparing an electrolyte film for an all-solid-state thin-film lithium-ion battery, in particular to provide an electrolyte film with high ionic conductivity and low electronic conductivity, which is applied to the production of small volume, high energy density and long life All-solid-state thin-film lithium-ion battery. Background technique [0002] All-solid-state thin-film lithium-ion battery is a new type of energy carrier emerging with the ultra-miniaturization of microelectronic devices such as dynamic random access memory (DRAMS), micro-sensors, micro-electromechanical systems (MEMS) and implanted medical devices. The battery has attracted much attention due to its advantages such as high energy density, high voltage, long cycle life, and high safety performance. Among them, the electrolyte, as one of the important components of the thin film lithium battery, is an indispensable part to complete the electr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01M10/0562H01M10/0525C23C14/35
CPCC23C14/35H01M10/0525H01M10/0562Y02E60/10
Inventor 谢海保劳景兴
Owner 惠州市佰特瑞科技有限公司
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