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Method for manufacturing highly sensitive surface-enhanced Raman scattering porous silicon photonic crystal biosensor

A surface-enhanced Raman and biosensor technology, applied in the field of biosensors, can solve problems such as difficulty in preparing biosensors with higher sensitivity, and achieve the effects of improving device sensitivity, improving detection signal strength, and strong signal strength

Inactive Publication Date: 2016-08-17
XINJIANG UNIVERSITY
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Problems solved by technology

It is difficult to fabricate higher-sensitivity biosensors due to structural limitations of single-layer porous silicon

Method used

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  • Method for manufacturing highly sensitive surface-enhanced Raman scattering porous silicon photonic crystal biosensor
  • Method for manufacturing highly sensitive surface-enhanced Raman scattering porous silicon photonic crystal biosensor
  • Method for manufacturing highly sensitive surface-enhanced Raman scattering porous silicon photonic crystal biosensor

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Embodiment Construction

[0025] In order to clearly understand the technical solutions of the present invention, the technical solutions of the present invention are further described in detail below through the accompanying drawings and embodiments. Obviously, the specific implementation of the embodiments of the present invention is not limited to the special details familiar to those skilled in the art. Preferred embodiments of the present invention are described in detail below, and other embodiments are possible in addition to those described in detail.

[0026] The preparation method of the highly sensitive surface enhanced Raman scattering (SERS) porous silicon photonic crystal biosensor device of the present invention comprises the following steps:

[0027] S1. Select an N-type single crystal silicon wafer with a crystal orientation of , a resistivity of 0.01-0.02Ω·cm, and a thickness of 400 μm, and perform electrochemical etching on the N-type single crystal silicon under no light and normal ...

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Abstract

The invention discloses a method for preparing a high-sensitivity surface-enhanced Raman scattering porous silicon photonic crystal biosensor device. The method includes the following steps: S1. Using an electrochemical corrosion method to make the surface of N-type single crystal silicon into macropores A porous silicon Bragg reflector with alternately stacked layers-mesoporous layers; S2. Using the porous silicon Bragg reflector as a base material, preparing silver nanoparticles attached in the pores to obtain a porous silicon photonic crystal biosensor device. The invention utilizes the special photon transmission characteristics of photonic crystals and the optical long-distance pool effect to increase the interaction length between light and matter, effectively improving the detection signal strength and sensitivity of the device, the Raman signal strength is about 5 times that of single-layer porous silicon, and the detection limit It is two orders of magnitude higher than that of single-layer porous silicon.

Description

technical field [0001] The invention belongs to the field of biosensors, in particular to a preparation method of a highly sensitive surface-enhanced Raman scattering porous silicon photonic crystal biosensor. Background technique [0002] Photonic crystal biosensors are used in the analysis and detection of various living substances and chemical substances due to their special photon transmission characteristics. Biosensors integrate biology, chemistry, physics, information science and related technologies and become an important field of modern scientific research. [0003] Porous silicon as a substrate material has been widely used in the experimental research and application of biological detection. By adjusting the different porosity of porous silicon, a layered structure with varying effective refractive index is obtained. Various porous silicon multilayer structures can be prepared by alternating changes of electrochemical corrosion current density. Composite photo...

Claims

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Application Information

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IPC IPC(8): G01N21/65
CPCG01N21/658
Inventor 王佳佳贾振红吕小毅
Owner XINJIANG UNIVERSITY
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