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Method for processing steel bottles of high-purity arsine

A pure arsine and steel cylinder technology, applied in the method of container discharge, gas treatment/storage purpose, fluid treatment, etc., can solve the problems of small output, no high-purity arsine steel cylinder treatment system, etc., and achieve the effect of reducing emissions

Active Publication Date: 2016-09-07
SHANGHAI ZHENGFAN TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to technical reasons, my country can only produce arsine with a purity of about 3N-4N, and the output is very small, so there is no treatment system for high-purity arsine cylinders in China

Method used

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  • Method for processing steel bottles of high-purity arsine

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] A steel cylinder method for processing high-purity arsine:

[0023] Step 1: Use high-purity helium A to replace the entire main pipeline 9 to ensure that the pipeline is not polluted, and then use the vacuum pump 4 to vacuum the main pipeline 9;

[0024] Step 2: Set the temperature of the oven 3 at 60°C. Under the condition of keeping the vacuum pump 4 running, vacuum bake the steel cylinder 2 to be treated for 8 hours, and keep the steel cylinder 2 at 60-100°C; The steel cylinder 2 is filled with helium until the pressure gauge 7 shows 1 bar, and then the helium is pumped out by the vacuum pump 5 until the vacuum gauge 8 shows 0;

[0025] Step 3: Open the cylinder valve of the source gas cylinder 1, set the pressure of the pressure regulating valve 6 at 1 bar, fill the cylinder 2 to be treated with arsine gas until the pressure gauge 7 shows 0.1 bar, and carry out arsenic passivation on the cylinder 2 to be treated. Bake for 24 hours;

[0026] Step 4: Open the cylind...

Embodiment 2

[0030] A steel cylinder method for processing high-purity arsine:

[0031] Step 1: Use high-purity helium A to replace the entire main pipeline 9 to ensure that the pipeline is not polluted, and then use the vacuum pump 4 to vacuum the main pipeline 9;

[0032] Step 2: Set the temperature of the oven 3 at 100°C. Under the condition of keeping the vacuum pump 4 running, vacuum bake the steel cylinder 2 to be treated for 4 hours, and keep the steel cylinder 2 at 60-100°C; The steel cylinder 2 is filled with helium until the pressure gauge 7 shows 1.5 bar, and then the helium is pumped out by the vacuum pump 4 until the vacuum gauge 8 shows 0;

[0033] Step 3: Open the cylinder valve of the source gas cylinder 1, set the pressure of the pressure regulating valve 6 at 3bar, fill the cylinder 2 to be treated with arsine gas until the pressure gauge 7 shows 0.5bar, and carry out arsenic passivation on the cylinder 2 to be treated. Bake for 12 hours;

[0034] Step 4: Open the cylin...

Embodiment 3

[0038] A steel cylinder method for processing high-purity arsine:

[0039] Step 1: Use high-purity helium A to replace the entire main pipeline 9 to ensure that the pipeline is not polluted, and then use the vacuum pump 4 to vacuum the main pipeline 9;

[0040] Step 2: Set the temperature of the oven 3 at 80°C. Under the condition of keeping the vacuum pump 4 running, after the steel cylinder 2 to be treated is vacuum baked for 6 hours, the steel cylinder 2 to be treated is always kept at 60-100°C; The steel cylinder 2 is filled with helium until the pressure gauge 7 shows 1.3 bar, and then the helium is pumped out by the vacuum pump 4 until the vacuum gauge 8 shows 0;

[0041] Step 3: Open the cylinder valve of the source gas cylinder 1, set the pressure of the pressure regulating valve 6 at 2bar, fill the cylinder 2 to be treated with arsine gas until the pressure gauge 7 shows 0.3bar, and carry out arsenic passivation on the cylinder 2 to be treated. Bake for 18 hours;

...

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Abstract

The invention discloses a method for processing steel bottles of high-purity arsine. The method includes the steps that valve outlets in the tops of the multiple to-be-processed steel bottles are connected to a main pipeline through steel bottle connectors; a valve outlet of a source gas steel bottle containing arsine and a valve outlet of a cold trap collection steel bottle are connected to the main pipeline through steel bottle connectors; replacement is conducted on the main pipeline through high-purity helium, it is ensured that the pipeline is not contaminated, and then the main pipeline is vacuumized through a vacuum pump; under the condition that the vacuum pump keeps running, vacuum baking is conducted on the to-be-processed steel bottles, helium is then injected into the to-be-processed steel bottles, and then the helium is pumped out through the vacuum pump; a steel bottle valve of the source gas steel bottle is opened, and arsine gas is injected into the to-be-processed steel bottles; helium is injected into the to-be-processed steel bottles, and then the helium is pumped out through the vacuum pump; and steel bottle valves of the to-be-processed steel bottles are closed, and the to-be-processed steel bottles are completely processed at the moment. According to the method, the arsine gas used for passivation is recycled, emission of the arsine-containing gas is well reduced, and the aim of cyclic economy is achieved.

Description

technical field [0001] The invention relates to a method for processing high-purity arsine steel cylinders, and belongs to the technical field related to electronic special gases. Background technique [0002] Arsane (AsH 3 ) is a very important electron gas, as an n-type dopant, it plays a key role in epitaxy and ion implantation processes. At the same time, arsine is also an important raw material for the synthesis of compound semiconductors gallium arsenide (GaAs) and gallium arsenide phosphide (GaAsP). Compound semiconductors are widely used in the manufacture of light-emitting diodes (LEDs) and high-efficiency solar cells. [0003] Arsane (AsH 3 ) synthesis cannot be achieved by simple elemental reactions, and is usually prepared using the hydrolysis of metal arsenides. The yield depends on the nature of the metal elements in the arsenide and which decomposer is used. Typical yields are between 14% and 86%. [0004] The purity of arsane currently used in the elect...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F17C7/00F17C13/02
CPCF17C7/00F17C13/025F17C2201/0119F17C2201/032F17C2201/056F17C2221/01F17C2223/0123F17C2225/0123F17C2227/0142F17C2250/0626F17C2260/044F17C2270/05
Inventor 汤剑波李东升
Owner SHANGHAI ZHENGFAN TECH
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