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Device for producing cleaned crushed product of polycrystalline silicon blocks, and method for producing cleaned crushed product of polycrystalline silicon blocks using same

A manufacturing device and polycrystalline technology, which are applied in the directions of cleaning methods, cleaning methods and utensils, chemical instruments and methods using gas flow, etc., can solve the problems such as the inability to easily achieve the cleaning of broken objects and the inability to efficiently implement them, etc. Achieve the effect of reducing mixing and easy manufacturing

Inactive Publication Date: 2016-09-07
TOKUYAMA CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, this operation cannot be implemented efficiently, and it is impossible to simply achieve sufficient cleaning of the broken objects.

Method used

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  • Device for producing cleaned crushed product of polycrystalline silicon blocks, and method for producing cleaned crushed product of polycrystalline silicon blocks using same
  • Device for producing cleaned crushed product of polycrystalline silicon blocks, and method for producing cleaned crushed product of polycrystalline silicon blocks using same
  • Device for producing cleaned crushed product of polycrystalline silicon blocks, and method for producing cleaned crushed product of polycrystalline silicon blocks using same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0085] use image 3 and Figure 4 The apparatus shown performs cleaning of crushed polycrystalline silicon lumps. The crushed polycrystalline silicon lumps to be processed are rod-shaped polycrystalline silicon lumps with a diameter of 120 to 140 mm produced by the Siemens method, and crushed into particle diameters (major diameters) of 110 mm or less by a crusher with cemented carbide teeth. Small pieces with a long diameter range of 8 to 50 mm and an average particle diameter of 30 mm are classified by a classifying device. In addition, the cumulative major axis of 90% by mass of the classified product was 38 mm.

[0086] here, image 3 and Figure 4 In the device, the conveyor belt 2 is coated with fluorocarbon resin of amide resin fiber, and the size of the mesh opening is 4mm. Again, the air jet 5 for blowing off the micropowder 6 is arranged above at the upstream of the moving direction of the conveyor belt, below at the downstream, and above again at the further do...

Embodiment 2

[0090] The air-flow ejected by the air jet injector 5 of all blowing off can be adjusted in every unit area (mm 2 ) except that the injection port has a flow rate of 32.3L / min, all the other are identical with embodiment 1. The degree of cleaning will be evaluated by performing surface metal concentration analysis and surface fine powder concentration analysis on the obtained crushed polycrystalline silicon lump. The results are shown in Table 1.

Embodiment 3

[0092] The air-flow ejected by the air jet injector 5 of all blowing off can be adjusted in every unit area (mm 2 ) except that the injection port has the flow rate of 58.6L / min, all the other are identical with embodiment 1. The degree of cleaning will be evaluated by performing surface metal concentration analysis and surface fine powder concentration analysis on the obtained crushed polycrystalline silicon lump. The results are shown in Table 1.

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Abstract

To provide a production device whereby, after crushing polycrystalline silicon blocks, contaminating fine powders, such as a fine metal powder and fine silicon powder, can be efficiently removed by blowing a gas stream thereto. A device for producing a cleaned crushed product of polycrystalline silicon blocks, said device being provided with: a) a conveying belt conveyer for a crushed product of polycrystalline silicon blocks, said conveying belt preferably being mesh-like; b) a gas stream-injector for blowing away fine powders mixed in the crushed product of polycrystalline silicon blocks, said injector being placed above a travel surface of the conveying belt of the conveying belt conveyer; and c) a mesh for preventing scattering of the crushed product of polycrystalline silicon blocks, said mesh being placed between the travel surface of the mesh-like conveying belt and the gas stream-injector for blowing away fine powders that is provided above the travel surface.

Description

technical field [0001] The present invention relates to a manufacturing device of purified polycrystalline silicon lump fragments, and a method of manufacturing purified polycrystalline silicon lump fragments using the manufacturing apparatus. Background technique [0002] Silicon wafers used in the manufacture of semiconductor devices or solar cells are generally manufactured using rod-shaped polycrystalline silicon ingots manufactured by the Siemens method, and then manufactured by the following method. That is, the silicon block is crushed and sorted into fist-sized fragments, and the obtained polycrystalline silicon block fragment is used as a raw material to produce a cylindrical silicon crystal rod by the Tchaikorasky method, and then the silicon crystal is Rod slices are ground and cut to obtain wafers. [0003] Cracking the above-mentioned polycrystalline silicon block is generally carried out by using a mallet manually. In addition, in order to obtain a large amou...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/02B07B4/08B65G15/54
CPCB07B4/08C01B33/02B08B5/023H01T19/00
Inventor 西村茂树藤井正美川口一博义松信昭浅野哲郎
Owner TOKUYAMA CORP