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A kind of preparation method of flexible thermosensitive film

A heat-sensitive thin-film, flexible technology, applied in metal material coating process, vacuum evaporation plating, coating and other directions, to achieve the effect of easy realization, industrialized production and good consistency

Active Publication Date: 2019-06-28
XINJIANG TECHN INST OF PHYSICS & CHEM CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The invention realizes the preparation of flexible heat-sensitive films at room temperature

Method used

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  • A kind of preparation method of flexible thermosensitive film
  • A kind of preparation method of flexible thermosensitive film
  • A kind of preparation method of flexible thermosensitive film

Examples

Experimental program
Comparison scheme
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Embodiment 1

[0020] In the method for preparing a flexible thermal film according to the present invention, the high-vacuum coating device involved in the method is composed of a target material, a substrate, a substrate disk, a vacuum cavity, a target holder and a laser. Paste the substrate 2 on the substrate disc 3, and install the target material 1 on the target holder 5 ( figure 1 ), follow the steps below:

[0021] a. Prepare manganese-cobalt-nickel-based oxide nano-powder and ceramic target by room temperature solid-phase method: weigh Mn by molar ratio Mn:Co:Ni=52:32:16 2 O 3 , Co 2 O 3 and NiO 2 Powder, put the three oxide raw materials into the agate ball mill tank, and put the agate balls in the tank, the volume ratio of the ball to the material is 1:1, place the ball mill tank on the planetary ball mill, and grind for 8 hours, so that the raw materials are Fully reacted during the grinding process, then the ground product powder was taken out, placed in a muffle furnace, pr...

Embodiment 2

[0028] The high-vacuum coating device involved in the method of the present invention is the same as that of Example 1, and the specific operations are carried out according to the following steps:

[0029] a. Prepare manganese-cobalt-nickel-based oxide nano-powder and ceramic target by room temperature solid-phase method: weigh Mn by molar ratio Mn:Co:Ni=52:32:16 2 O 3 , Co 2 O 3 and NiO 2 Powder, put the three oxide raw materials into the agate ball mill tank, and put the agate balls in the tank, the volume ratio of the ball to the material is 1:2, the ball mill tank is placed on the planetary ball mill, and ground for 3 hours, so that the raw materials are Fully reacted during the grinding process, then the ground product powder was taken out, placed in a muffle furnace, pre-fired at a temperature of 850 ° C for 1 hour, naturally cooled to room temperature, taken out, and manually ground to obtain manganese-cobalt-nickel-based oxide nanometers powder;

[0030] b. Prepa...

Embodiment 3

[0036] The high-vacuum coating device involved in the method of the present invention is the same as that of Example 1, and the specific operations are carried out according to the following steps:

[0037] a. Prepare manganese-cobalt-nickel-based oxide nano-powder and ceramic target by room temperature solid-phase method: weigh Mn by molar ratio Mn:Co:Ni=52:32:16 2 O 3 , Co 2 O 3 and NiO 2 Powder, put the three oxide raw materials into the agate ball mill tank, and put the agate balls in the tank, the volume ratio of the ball to the material is 1:3, the ball mill tank is placed on the planetary ball mill, and ground for 3 hours, so that the raw materials are Fully reacted during the grinding process, then the ground product powder was taken out, placed in a muffle furnace, pre-fired at a temperature of 850 ° C for 1 hour, naturally cooled to room temperature, taken out, and manually ground to obtain manganese-cobalt-nickel-based oxide nanometers powder;

[0038] b. Prepa...

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Abstract

The invention relates to a preparation method of flexible thermosensitive films. A high-vacuum film plating device to which the invention relates consists of a target, a substrate, a substrate disc, a vacuum cavity, a target holder and a laser. Nanoscale ceramic oxide powder with small particles and uniform particle size distribution is prepared by use of a room-temperature solid phase method; the powder is tabletted and sintered to obtain a high-density ceramic target; a manganese-cobalt-nickel-based oxide film is deposited on the surface of a polyimide substrate by adoption of a high-vacuum film plating technology; and the post-annealing treatment is performed on the deposited film. The industrialized batch production of the flexible thermosensitive films with high quality and stable electric performance is realized. The preparation method realizes preparation of the flexible thermosensitive films under the condition of room temperature. The method is simple to operate, easy to realize, low in cost and suitable for preparation of various ceramic films, has such advantages as good reliability, high yield, high flatness, controllable thickness precision and uniform interior, is very suitable for batch production, and has very broad application prospects.

Description

technical field [0001] The invention relates to a preparation method of a flexible thermal film. Background technique: [0002] Since flexible electronic materials have the advantages of light weight, convenient installation, good environmental adaptability, and strong impact resistance, they have become an indispensable research direction in the research and development of modern optoelectronic devices and spintronics. In recent years, with the development of flexible wearable devices, flexible infrared stealth films, flexible photodiodes, flexible thermoelectric semiconductors, and flexible solar cells, more and more researchers have devoted themselves to the study of flexible oxide films. However, studies on flexible thermistor films with negative temperature coefficient thermistor properties are rare. [0003] Mn 1.56 Co 0.96 Ni 0.48 O 4±δ The material is one of the most widely studied Negative Temperature Coefficient (NTC) thermistor materials. Compared with other ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/08C23C14/28
CPCC23C14/08C23C14/28
Inventor 孔雯雯常爱民高博姚金城
Owner XINJIANG TECHN INST OF PHYSICS & CHEM CHINESE ACAD OF SCI