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Titanium alloy grinding and chemical mechanical polishing method

A chemical mechanical and titanium alloy technology, applied in chemical instruments and methods, grinding machine tools, grinding/polishing equipment, etc., can solve problems such as operator and environmental hazards, difficult to control motion trajectory, scratches, etc.

Active Publication Date: 2019-01-18
CHANGZHOU INST OF DALIAN UNIV OF TECH
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Problems solved by technology

[0003] At present, the ultra-precision processing method of titanium alloy mainly adopts free abrasive grinding and chemical mechanical polishing. The grinding liquid is free silicon carbide or alumina abrasive, and the polishing liquid mainly uses strong acid, strong alkali or toxic chemical reagents. It is difficult for free abrasives to control their trajectory, and it is easy to leave deep scratches on the processing surface, which reduces the processing accuracy
The handling of strong acids, strong bases and toxic chemical reagents is very troublesome, time-consuming and labor-intensive, and has significant potential hazards to operators and the environment

Method used

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  • Titanium alloy grinding and chemical mechanical polishing method
  • Titanium alloy grinding and chemical mechanical polishing method
  • Titanium alloy grinding and chemical mechanical polishing method

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Embodiment Construction

[0025] The specific implementation manner of the present invention will be described in detail below in conjunction with the technical solutions.

[0026] The titanium alloy sample is Ti-6Al-4V, the size is 10×10×1.5mm 3, using 502 glue to evenly bond 4 titanium alloy samples to the circumference of an aluminum alloy disk with a diameter of 150mm, and load it with a counterweight. Bond the aluminum oxide waterproof sandpaper on the stainless steel grinding disc of the grinding and polishing machine, and the alumina abrasive size selected in turn is 26μm, 16μm, 10μm, 4μm, 26 and 16μm. The grinding time of the aluminum oxide waterproof sandpaper is 5min, 10μm and 4μm The grinding time of the aluminum oxide waterproof sandpaper is 14min, 15min and 16min respectively. When replacing waterproof sandpaper with different abrasive sizes, the titanium alloy samples were cleaned with deionized water and dried with an air gun. During grinding, the rotational speeds of the grinding disc...

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Abstract

The invention discloses a titanium alloy grinding and chemical-mechanical polishing method and belongs to the technical field of ultra-precision machining of metal alloy. When solidified abrasive material is ground, the grinding time of aluminium oxide waterproof abrasive paper with the size of 26 microns and 16 microns is 4-6 minutes, and the grinding time of aluminium oxide waterproof abrasive paper with the size of 10 microns and 4 microns is 14-20 minutes. During grinding, the revolving speed of a grinding disc and a workpiece is 50-80 rpm, the loading method is balancing weight or weight, and the grinding pressure is 22-30 kPa. When chemical-mechanical polishing is carried out, a polishing pad is a black villus polishing pad, the polishing pressure is 65-80 kPa, the revolving speed of a polishing disc and a workpiece is 65-85 rpm, and the polishing time is 14-20 min; polishing solution contains ludox, an oxidizing agent, a complexing agent and deionized water, the oxidizing agent is hydrogen peroxide, and the complexing agent is malic acid or citric acid; the weight percentage of the ludox abrasive material is 18-25%, the weight percentage of hydrogen peroxide is 40-50%, the weight percentage of hydrogen peroxide in the polishing solution is 4-6%, and the pH value of the polishing solution is 4.2-4.8. With adoption of the method, ultraprecise polishing of titanium alloy is realized.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision machining of metal alloys, and relates to ultra-precision machining methods for metal alloy grinding and chemical mechanical polishing, in particular to titanium alloy grinding and ultra-precision polishing methods. Background technique [0002] Due to the advantages of light specific gravity, high specific strength, strong corrosion resistance and good biocompatibility, titanium alloy is widely used in aviation, aerospace, marine, electric power, petrochemical, communication, light industry, medical and other fields. Titanium has a strong affinity with oxygen, nitrogen, and carbon, and is easy to form a passivation film with stable chemical properties. Due to the strong affinity with oxygen, the processing of titanium alloys is prone to oxidation, forming a ceramic film on the surface, which aggravates tool wear; in addition, it is easy to react with high-speed steel and other C-containin...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/00B24B37/34B24B29/02C09G1/18C09K3/14
CPCB24B29/02B24B37/00B24B37/34C09G1/18C09K3/1463
Inventor 张振宇史智丰黄思玲郭梁超王博董艳艳
Owner CHANGZHOU INST OF DALIAN UNIV OF TECH
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