A protection device and processing method for a sensitive structure of a quartz micromachined accelerometer

Abstract

The invention relates to a protection device and a processing method for a sensitive structure of a quartz micromechanical accelerometer. The protection device selects a quartz crystal of the same material and cut shape as the sensitive structure as a base material, adopts a high-precision photolithography process to make patterns, and uses wet etching It is processed by etching process, and the sensitive structure and protective structure are assembled by epoxy adhesive bonding, forming a three-layer assembly structure in which the upper and lower layers are the protective structure and the middle layer is the sensitive structure, and the upper and lower protective structures are sensitive to the middle layer. The mass block on the structure plays the role of limit protection, and at the same time, the groove area is etched to a certain depth on the protection device, providing space for the deformation of the sensitive structural mass block, and at the same time, high alignment accuracy is achieved with the help of an optical microscope system. The protection device of the present invention effectively improves the impact resistance of the sensitive structure, avoids the stress caused by the difference in thermal expansion coefficient, improves the reliability of the sensitive structure, and has high assembly precision, simple process and easy implementation.

Description

technical field [0001] The invention belongs to the technical field of micromechanical accelerometers and quartz resonant devices, and in particular relates to a protection device and a processing method for a sensitive structure of a quartz micromechanical accelerometer, so as to improve the high impact resistance of the sensitive structure. Background technique [0002] Micromechanical accelerometers have the advantages of small size, light weight, low power consumption, and low cost. They can be combined with micromechanical gyroscopes to form micro-inertial measurement devices or inertial navigation systems, and combined with other navigation systems such as GPS to form high-performance , All-weather navigation and positioning system. Therefore, micromachined accelerometers have a wide range of applications in military fields such as antenna platform stabilization systems, aircraft or missile navigation systems, and smart bomb guidance systems. In addition, due to the l...

AI Technical Summary

Problems solved by technology

[0005] The French National Aeronautics and Space Agency (ONERA) disclosed the structural scheme of the vibrating beam quartz accelerometer developed by it in the US patent USP5962786, but the strong vibration and shock resistance of its sensitive structure is difficult to meet the requirements of high-performance devices, especially in sensitive structures. Sensitive direction, can not be used in harsh environmental conditions

Images