A protection device and processing method for a sensitive structure of a quartz micromachined accelerometer

A sensitive structure, accelerometer technology, applied in the direction of speed/acceleration/shock measurement, measurement device, gyro effect for speed measurement, etc. Improve the reliability of structural assembly, ensure machining accuracy, and avoid the effect of fracture failure

Active Publication Date: 2014-10-22
BEIJING RES INST OF TELEMETRY +1
View PDF1 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The French National Aeronautics and Space Agency (ONERA) disclosed the structural scheme of the vibrating beam quartz accelerometer developed by it in the US patent USP5962786, but the strong vibration and shock resistance of its sensitive structure is difficult to meet the requirements of high-performance devices, especially in sensitive structures. Sensitive direction, can not be used in harsh environmental conditions

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A protection device and processing method for a sensitive structure of a quartz micromachined accelerometer
  • A protection device and processing method for a sensitive structure of a quartz micromachined accelerometer
  • A protection device and processing method for a sensitive structure of a quartz micromachined accelerometer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0037] Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:

[0038] Such as figure 1 Shown is a schematic diagram of the sensitive structure of the quartz micromachined accelerometer of the present invention, as can be seen from the figure, the sensitive structure 1 of the quartz micromachined accelerometer includes a fixed support arm 3, an outer connection 2, a frame 4, an inner connection 7, a base body 6, a flexible pendulum 5, Vibrating beam 8 and mass block 9. Among them, the thickness of the flexible pendulum 5 and the vibrating beam 8 is 30 μm to 80 μm. There are two flexible pendulums 5 located symmetrically on both sides of the quartz wafer, and the thickness of other parts is 500 μm. Quartz wafer sides. The entire sensitive structure of the accelerometer is an integrated structure, and there is no assembly link. When the accelerometer is in working state, the vibrating beam 8 bends and vibra...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention relates to a protection device and a processing method for a sensitive structure of a quartz micromechanical accelerometer. The protection device selects a quartz crystal of the same material and cut shape as the sensitive structure as a base material, adopts a high-precision photolithography process to make patterns, and uses wet etching It is processed by etching process, and the sensitive structure and protective structure are assembled by epoxy adhesive bonding, forming a three-layer assembly structure in which the upper and lower layers are the protective structure and the middle layer is the sensitive structure, and the upper and lower protective structures are sensitive to the middle layer. The mass block on the structure plays the role of limit protection, and at the same time, the groove area is etched to a certain depth on the protection device, providing space for the deformation of the sensitive structural mass block, and at the same time, high alignment accuracy is achieved with the help of an optical microscope system. The protection device of the present invention effectively improves the impact resistance of the sensitive structure, avoids the stress caused by the difference in thermal expansion coefficient, improves the reliability of the sensitive structure, and has high assembly precision, simple process and easy implementation.

Description

technical field [0001] The invention belongs to the technical field of micromechanical accelerometers and quartz resonant devices, and in particular relates to a protection device and a processing method for a sensitive structure of a quartz micromechanical accelerometer, so as to improve the high impact resistance of the sensitive structure. Background technique [0002] Micromechanical accelerometers have the advantages of small size, light weight, low power consumption, and low cost. They can be combined with micromechanical gyroscopes to form micro-inertial measurement devices or inertial navigation systems, and combined with other navigation systems such as GPS to form high-performance , All-weather navigation and positioning system. Therefore, micromachined accelerometers have a wide range of applications in military fields such as antenna platform stabilization systems, aircraft or missile navigation systems, and smart bomb guidance systems. In addition, due to the l...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/00
Inventor 杨贵玉杨挺闫海陈艳邹江波
Owner BEIJING RES INST OF TELEMETRY
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap