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Ultrathin raw ceramic belt manufacturing method applied in ceramic co-firing technology

A technology of co-fired ceramics and a manufacturing method, which is applied to ceramic molding machines, manufacturing tools, etc., can solve the problems of increasing the number of wiring layers, the limit of the film thickness of green ceramic tapes, etc., so as to improve the assembly density and realize industrial mass production and preparation. simple effect

Inactive Publication Date: 2016-11-23
UNIV OF ELECTRONICS SCI & TECH OF CHINA +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a method for making ultra-thin green ceramic tapes applied to co-fired ceramic technology. The thickness of the green ceramic tapes prepared by the present invention is less than 10 μm, which solves the film thickness limit of the green ceramic tapes prepared by the traditional casting process. The problem of increasing the number of wiring layers under the same device size can be achieved; at the same time, the invention solves the problem of ceramic green tape graphics processing technology in combination with the pattern transfer principle of photoresist material, which can improve assembly density, production efficiency and reliability

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] A method for manufacturing an ultra-thin green ceramic tape applied to co-fired ceramic technology, comprising the following steps:

[0022] Step A: prepare photosensitive ceramic composite material solution; in a dark room, add 70 grams of ceramic powder with an average particle size of 0.6 μm in 30 grams of photosensitive polyimide and disperse evenly, so that the mass percentage of ceramic powder is 70% , and then add 60ml of dimethylformamide to form a photosensitive ceramic composite solution;

[0023] Step B: Spin coating to form a film; spin-coat the photosensitive ceramic composite solution prepared in step A on the substrate to form a uniform film; the present invention adopts a spin coating method, and a static coating process or a dynamic spraying process can be adopted through a rotary coating machine , by controlling parameters such as rotation speed, rotation acceleration and time, a thin, uniform and defect-free photosensitive adhesive ceramic composite f...

Embodiment 2

[0028] Step A: prepare the photosensitive ceramic composite material solution; in a darkroom, add 50 grams of ceramic powder with an average particle size of 0.5 μm in 50 grams of diphenylethylene disulphonate sodium (DAS) and disperse evenly, so that the ceramic The powder mass percentage content is 50%, and then 50ml of tetrahydrofuran is added to form a photosensitive ceramic composite solution;

[0029] Step B: Spin coating to form a film; spin-coat the photosensitive ceramic composite solution prepared in step A on the substrate to form a uniform film; the present invention adopts a spin coating method, and a static coating process or a dynamic spraying process can be adopted through a rotary coating machine , by controlling parameters such as rotation speed, rotation acceleration and time, a thin, uniform and defect-free photosensitive adhesive ceramic composite film is formed on the surface of the substrate;

[0030] Step C: Alignment exposure; in a darkroom, accurately...

Embodiment 3

[0034] Step A: Prepare a photosensitive ceramic composite material solution; in a dark room, add 90 grams of ceramic powder with an average particle size of 0.4 μm to 10 grams of photosensitive benzocyclobutene and disperse evenly, so that the mass percentage of the ceramic powder is 90 %, then add 70ml n-butanol to form photosensitive ceramic composite solution;

[0035] Step B: Spin coating to form a film; spin-coat the photosensitive ceramic composite solution prepared in step A on the substrate to form a uniform film; the present invention adopts a spin coating method, and a static coating process or a dynamic spraying process can be adopted through a rotary coating machine , by controlling parameters such as rotation speed, rotation acceleration and time, a thin, uniform and defect-free photosensitive adhesive ceramic composite film is formed on the surface of the substrate;

[0036] Step C: Alignment exposure; in a darkroom, accurately cover the mask plate on a specific ...

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Abstract

The invention discloses an ultrathin raw ceramic belt manufacturing method applied in the ceramic co-firing technology and belongs to the technical field of electronic material and process. According to the ultrathin raw ceramic belt manufacturing method applied in the ceramic co-firing technology, a pattern transfer theory of photolithography is adopted. The ultrathin raw ceramic belt manufacturing method applied in the ceramic co-firing technology comprises the following steps that firstly, ceramic powder is evenly dispersed in photoresist; organic solvent is added to obtain a photosensitive ceramic complex solution; the photosensitive ceramic complex solution is painted on a fixed baseplate to form an even and zero-defected thin film through a spin-coating process; the obtained thin film is covered with a specialized mask; a targeted pattern is formed through exposure and developing treatment; and finally raw ceramic sheets are obtained after drying and solidifying. According to the ultrathin raw ceramic belt manufacturing method applied in the ceramic co-firing technology, the thickness of an obtained raw ceramic belt is smaller than 10 [mu]m; the problem that the film thickness of the raw ceramic belt obtained according to a traditional tape casting process is limited is solved; the requirement of increasing the number of wire arranging layers under components in the same size is achieved; and meanwhile, the pattern transfer theory of photoresist materials is combined, a pattern processing technique of the raw ceramic belt is realized, and assembly density, producing efficiency and reliability are improved.

Description

technical field [0001] The invention belongs to the technical field of electronic materials and technology, and in particular relates to a method for making an ultra-thin raw porcelain tape applied in co-fired ceramic technology. Background technique [0002] Electronic devices and modules are rapidly developing in the direction of miniaturization, integration, planarization and high frequency. Low temperature co-fired ceramic technology (LTCC) and high temperature co-fired ceramic technology (HTCC) are due to their unique multi-layer circuit structure. And excellent magnetoelectric properties, are widely used in the production of electronic devices and high-performance modules. It is made of electronic ceramics or ferrite powder by casting method into a green tape with uniform thickness and controllability, on which the required circuit pattern is made by conductor printing process, and then laminated together. Sintering to make a high-density circuit that does not interfe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28B1/30B28B11/00
CPCB28B1/30B28B11/00
Inventor 李元勋李亚菲苏桦陈大明韩莉坤张怀武谢云松
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA