Preparation method of wear-resistant coating

A wear-resistant coating and hard coating technology, applied in the field of preparation of wear-resistant coatings, can solve problems such as the decline of wear resistance, and achieve reduced residual stress, less adhesion and wear debris, and good tribological properties. Effect

Inactive Publication Date: 2016-12-07
SHENZHEN POLYTECHNIC
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Problems solved by technology

[0005] The technical problem to be solved by the present invention is to provide a preparation method of a wear-resistant coating, which can improve the resistance Grinding performance

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  • Preparation method of wear-resistant coating

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preparation example Construction

[0034] figure 1 is a flow chart of the preparation method 100 of the wear-resistant coating of the present invention. Such as figure 1 As shown, in the present invention, the preparation method 100 of the wear-resistant coating mainly includes the following steps:

[0035] Step 101, select a substrate with predetermined proper size and performance. The substrate is the cutting tool, mold and parts to be deposited wear-resistant coating, usually steel;

[0036] Step 102: cleaning and drying the surface of the substrate to be deposited. Specifically, alcohol, metal detergent and deionized water are usually used in sequence for ultrasonic cleaning for 3-8 minutes, and then dry N 2 Dry the surface to make the surface of the substrate to be deposited clean and easy to combine with the coating. After that, put the substrate into the vacuum chamber of the arc ion coating equipment;

[0037] Step 103: Perform sputter cleaning on the surface of the substrate to be deposited in th...

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Abstract

The invention relates to a preparation method of a wear-resistant coating. The preparation method is used for preparing a hard coating on the surface of a substrate and comprises the following steps: selecting the substrate with predetermined size and performance; cleaning and drying a to-be-deposited surface of the substrate; performing sputter cleaning on the to-be-deposited surface of the substrate in a vacuum room of arc ion plating equipment; injecting inert gases and N2 into the vacuum room; depositing a nitride hard coating on the surface of the substrate by adoption of the arc ion plating technology, and in the deposition process, enabling gradient increase or circular gradient increase of the flowrate of N2 to facilitate adjusting the residual stress in the hard coating; and performing vacuum annealing on the hard coating on the substrate to finally obtain the wear-resistant coating with large thickness. Through gradient increase or circular gradient increase of the flowrate of N2, the residual stress of the coating with large thickness is effectively reduced, and the coating has better scratch resistance and fracture toughness.

Description

technical field [0001] The invention relates to arc ion plating technology, more specifically, relates to a preparation method of wear-resistant coating. Background technique [0002] As an important protective coating, hard coating is widely used in the protection of the surface of cutting tools and gears due to its excellent tribological properties and corrosion resistance. In industry, arc ion plating technology, as a typical physical vapor deposition technology, is widely used in the preparation of hard coatings because of its high ionization rate, high deposition rate, and simple operation. This technology forms a hard film on the substrate, but the residual stress of the obtained hard film is generally compressive stress, and the value is often very large, even as high as -17GPa. Excessive residual compressive stress can make the hard film from the substrate. Fall off, or make it warp and bulge. [0003] A variety of methods have been proposed to suppress excessive r...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/06
CPCC23C14/0021C23C14/0641C23C14/325
Inventor 赵升升梅海娟程毓
Owner SHENZHEN POLYTECHNIC
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