SERS substrate based on metal dot matrix, preparation method of SERS substrate and method for conducting Raman detection through SERS substrate

A metal lattice and metal dot technology, applied in the field of analysis and detection, can solve problems such as hindering the pace of market application of SERS technology, restricting the actual promotion of SERS technology, and limited Raman signal gain effect, saving detection time and improving detection. Sensitivity, good effect of enhancement

Active Publication Date: 2017-01-04
SHENZHEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The advantages of SERS technology are very clear, but when the SERS technology is introduced to the laboratory level, the actual promotion of SERS technology is limited due to the lack of SERS active substrates suitable for practical applications
Today's SERS active substrates include two types, solid and liquid. Although solid active substrates have controllable periodic hot spots and can ensure the reproducibility of SERS measurements, such substrates cannot be stored for a long time. preparation, which increases the difficulty of some processes; and the liquid active substrate, althou

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  • SERS substrate based on metal dot matrix, preparation method of SERS substrate and method for conducting Raman detection through SERS substrate
  • SERS substrate based on metal dot matrix, preparation method of SERS substrate and method for conducting Raman detection through SERS substrate
  • SERS substrate based on metal dot matrix, preparation method of SERS substrate and method for conducting Raman detection through SERS substrate

Examples

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Embodiment 1

[0047] A method for preparing a SERS substrate based on a gold lattice, comprising the following steps:

[0048] (1) Take a piece of glass, first wash it with deionized water, then dry it with nitrogen, put it in acetone for 10 minutes, then take it out and clean it with deionized water, and finally dry it with nitrogen for use; A titanium metal layer with a thickness of 10 nanometers was vapor-deposited on the glass sheet by the method, and then a gold layer with a thickness of 100 nanometers was vapor-deposited on the titanium metal layer;

[0049] (2) Design a series of 4×4 dot matrix masks with CAD, the diameter of each gold dot is 1 mm, spin-coat photoresist on the gold layer, and cover the designed mask on the gold layer , placed in a photolithography machine, using aqua regia configured with a volume ratio of 1:3 to corrode the gold layer for 300 seconds, that is, a series of gold dots are formed on the titanium metal layer, and a gold lattice is obtained; figure 1 As ...

Embodiment 2

[0052] A method for preparing a SERS substrate based on a gold lattice, comprising the following steps:

[0053] (1) Take a piece of glass, first wash it with deionized water, then dry it with nitrogen, put it in acetone for 10 minutes, then take it out and clean it with deionized water, and finally dry it with nitrogen for use; A titanium metal layer with a thickness of 100 nanometers was vapor-deposited on the glass sheet by the method, and then a gold layer with a thickness of 500 nanometers was vapor-deposited on the titanium metal layer;

[0054] (2) Design a series of 4×4 dot matrix masks with CAD, the diameter of each gold dot is 0.6 mm, spin-coat photoresist on the gold layer, and cover the designed mask on the gold layer , placed in a photolithography machine, using aqua regia configured with a volume ratio of 1:3 to corrode the gold layer for 600 seconds, that is, a series of gold dots are formed on the titanium metal layer to obtain a gold lattice;

[0055] (3) Hyd...

Embodiment 3

[0059] A method for preparing a SERS substrate based on silver dot matrix, comprising the following steps:

[0060] (1) Take a piece of glass, first wash it with deionized water, then dry it with nitrogen, put it in acetone for 10 minutes, then take it out and clean it with deionized water, and finally dry it with nitrogen for use; A titanium metal layer with a thickness of 10 nanometers was vapor-deposited on the glass sheet by the method, and then a silver layer with a thickness of 100 nanometers was vapor-deposited on the titanium metal layer;

[0061] (2) Design a series of 4×4 dot matrix masks with CAD, the diameter of each silver dot is 0.2 mm, spin-coat photoresist on the gold layer, and cover the designed mask on the silver layer , placed in a photolithography machine, using aqua regia configured with a volume ratio of 1:3 to corrode the silver layer for 200 seconds, that is, a series of silver dots are formed on the titanium metal layer to obtain a silver lattice;

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Abstract

The invention provides an SERS substrate based on a metal dot matrix. The SERS substrate comprises a silicon substrate body, the metal dot matrix formed on the silicon substrate body and a hydrophobic layer arranged in an area outside the metal dot matrix. A metal layer of the metal dot matrix is made of gold or silver or copper. The area outside the metal dot matrix on the substrate has hydrophobicity, the positions of metal dots of the metal dot matrix are relatively hydrophilic, therefore, to-be-detected substances can be better enriched on the metal dots, and Raman signals can be enhanced. The invention further provides a preparation method of the substrate, a method for conducting Raman detection through the substrate and an SERS chip based on the metal dot matrix.

Description

technical field [0001] The invention relates to the field of analysis and detection, in particular to a SERS substrate based on a metal lattice, a preparation method thereof, and a Raman detection method using the substrate. Background technique [0002] Surface-enhanced Raman scattering (SERS) is widely used in food safety testing, medical diagnosis, material characterization, archaeology, criminal investigation and other fields due to its advantages of high sensitivity, non-destructive testing and in-situ measurement. . Especially in the field of hazardous substance detection and material characterization, SERS is a very important analytical method. [0003] The advantages of SERS technology are very clear, but when the SERS technology is introduced to the laboratory level, the actual promotion of SERS technology is limited due to the lack of SERS active substrates suitable for practical applications. Today's SERS active substrates include two types, solid and liquid. Al...

Claims

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Application Information

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IPC IPC(8): G01N21/65
CPCG01N21/658
Inventor 陈思郭志男张晗张玲
Owner SHENZHEN UNIV
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