Bandpass sigma-delta closed-loop detection circuit of silicon micro gyroscope

A silicon micro-gyroscope, closed-loop detection technology, applied in the direction of speed measurement, gyroscope/steering sensing equipment, measurement device, etc. with gyro effect, it can solve the problems that circuit parameters cannot be modified online, the SDM design process is complicated, etc., to improve the bandwidth , the effect of eliminating detection errors and eliminating sensitivity

Active Publication Date: 2017-01-11
SUZHOU GST INFOMATION TECH CO LTD
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0004] At present, the detection circuits of domestic silicon micro gyroscopes are mostly open-loop detection, and a few bandpass sigma-delta closed-loop detection circuits are designed for continuous time SDM. The design process of continuous time SDM is complicated, and the circuit parameters cannot be modified online.

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  • Bandpass sigma-delta closed-loop detection circuit of silicon micro gyroscope
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  • Bandpass sigma-delta closed-loop detection circuit of silicon micro gyroscope

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Embodiment

[0036] combine figure 1 , the present invention utilizes the structural principle of the Sigma-Delta modulator to design the above closed-loop detection circuit, as figure 2 As shown, the Sigma-Delta modulator is composed of an integrator Hf and a quantizer in the loop. The input model of the quantizer is replaced by e[n] in the figure, which represents the quantization noise caused by it; the order of the SDM is determined by the integral The number of integrators is determined by the number of integrators. The more the number of integrators, the better the noise suppression performance, but on the contrary, it will lead to the deterioration of the stability of the system. Among them, Hf represents a plurality of integrator structures; the advantage of SDM over samplers is that the quantization noise and input signal can pass through different transfer functions through the loop structure, so that the noise can be shaped, and the original useful signal can be preserved. . ...

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Abstract

The invention relates to a bandpass sigma-delta closed-loop detection circuit of silicon micro gyroscope. The circuit comprises connected SMG capacitance/voltage conversion circuits, pre-amplifier circuit, modulus converter, digital resonator, one-digit quantizer and one-digit DAC circuit; the closed-loop detection circuit can effectively eliminate detection error arising from error in mechanical processing, eliminate the sensitivity of detection output to the error in gyroscope and enhance the bandwidth of the whole detection circuit; it can also effectively performs noise shaping for the subsequent one-digit round and enhance the signal to noise ratio of the whole detection loop.

Description

technical field [0001] The invention relates to a control device, in particular to a silicon micro-gyroscope electromechanical combination band-pass sigma-delta closed-loop detection circuit. Background technique [0002] Silicon micro gyroscope is a kind of sensor used to measure the attitude or rotational angular velocity of moving objects, and it plays a huge role in both military and civilian applications. Silicon micro-angular rate sensor has the advantages of small size, light weight, high reliability, low cost, mass production, easy integration with electronic circuits, etc. Equipment and other military and civilian fields have a wide range of applications. [0003] The structure diagram of the silicon micro gyroscope as the basis of this patent is as follows figure 1 Shown is a typical Z-axis Coriolis gyroscope. The direction of the X-axis is its driving axis, and after cooperating with the driving interface circuit, an oscillation loop is formed to provide a spee...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5776
CPCG01C19/5776
Inventor 苏岩祝云峰
Owner SUZHOU GST INFOMATION TECH CO LTD
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