Method for producing waveguide substrate
A manufacturing method and substrate technology, which are applied in the directions of waveguide, semiconductor/solid-state device manufacturing, and waveguide-type devices, etc., can solve the problems of metal film peeling, difficult to reach plating solution, and inability to ensure metal film, and achieve the effect of preventing peeling.
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[0019] [Structure of waveguide substrate]
[0020] figure 1 is a perspective view showing the waveguide substrate 100, figure 2 is an end view showing the waveguide substrate 100 . It should be noted that although the conductor column 114 and the transmission path 122 are as figure 1 not present on the same face as shown, but on figure 2 Both are shown in the same end view for ease of presentation.
[0021] Such as figure 1 as well as figure 2 As shown, the waveguide substrate 100 of this embodiment includes: a glass substrate 101, a transmission path (planar circuit) 122 for signal propagation, a conductor pin 123, and a first ground conductor layer 111 and a second ground conductor layer 112 connected to a ground potential. , and waveguide 110 .
[0022] The glass substrate 101 is a glass substrate made of a single material. Instead of the glass substrate, a quartz substrate or a semiconductor substrate may be used.
[0023] The waveguide 110 is composed of a fir...
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