Vacuum ultraviolet LED junction temperature and radiation measuring system based on integrating sphere

A technology of vacuum ultraviolet and ultraviolet radiation, applied in the direction of diode testing, single semiconductor device testing, etc., can solve the problems of low radiation efficiency, no LED junction temperature measurement device, etc., achieve obvious constant temperature effect and improve measurement accuracy , the effect of preventing absorption
CN106501702AActive Publication Date: 2017-03-15上海复展智能科技股份有限公司 +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
上海复展智能科技股份有限公司
Publication Date
2017-03-15

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Abstract

The invention belongs to the technical field of semiconductor lighting devices, and specifically relates to a vacuum ultraviolet LED junction temperature and ultraviolet radiation measuring system based on an integrating sphere. The measuring system comprises an external bearing sphere which can be pumped to a low-vacuum state, an internal integrating sphere which can be pumped to a high-vacuum state, a constant temperature device, a measuring circuit, and a driving circuit. The bearing sphere and the integrating sphere are electrically connected by an aviation plug. The side wall of the internal integrating sphere is equipped with a standard lamp, a vacuum ultraviolet power meter probe and a vacuum ultraviolet spectrometer, and can measure the radiation flux and the spectrum of a vacuum ultraviolet LED. The constant temperature device is connected with a temperature feedback system and a computer control system, and can control the temperature accurately and quickly. The advantage lies in that the parameters of a vacuum ultraviolet LED, such as spectral power distribution, radiation flux, electric power, thermal power and junction temperature, can be measured simultaneously under constant junction temperature, and test is highly repeatable.
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Description

technical field

[0001] The invention belongs to the technical field of semiconductor lighting devices, and relates to a measurement device, in particular to a vacuum ultraviolet LED junction temperature and radiation measurement system based on an integrating sphere. Background technique

[0002] Vacuum ultraviolet (VUV) is an electromagnetic wave with a wavelength of 10−200 nm. VUV is strongly absorbed by oxygen in the air and can only propagate in a vacuum, hence the name. Because the photon energy of vacuum ultraviolet greatly exceeds the bond energy of all chemical bonds in organic molecules, it can produce photochemical reactions, and has many applications in sterilization, pollution treatment, and surface modification.

[0003] With the gradual expansion of the research field of semiconductor light sources, it has been found that wide-bandgap semiconductors can emit vacuum ultraviolet radiation with a wavelength below 200 nm. For example, the bandgap of AlN is 6.2 eV, ...

Claims

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