Transmission-type polarization aberration compensation device based on light-splitting polarization modulation

Abstract

The invention discloses a transmission-type polarization aberration compensation device based on light-splitting polarization modulation, and belongs to the technical field of polarization optics, and aims at solving a problem that a conventional polarization compensation device is poor in universality and is low in precision. The device is inputted into parallel optical paths of an optical system, and parallel incident light beams pass through a polarization beam splitter to be divided into a TM wave and a TE wave. The two light branches respectively pass through a transmission-type pure-phase liquid crystal spatial light modulator and a transmission-type pure-amplitude liquid crystal spatial light modulator: one light branches enters the transmission-type pure-phase liquid crystal spatial light modulator, and the transmission-type pure-phase liquid crystal spatial light modulator carries out the phase modulation of the light branch; the other light branch enters the transmission-type pure-amplitude liquid crystal spatial light modulator, and the transmission-type pure-amplitude liquid crystal spatial light modulator carries out the amplitude modulation of the light branch. Then, the two light branches are reflected by a first reflector and a second reflector to a depolarization beam splitter in a mutually perpendicular manner, and the depolarization beam splitter allows the light to come out after combination. The device is simple in structure, and facilitates the improvement of compensation precision.

Description

technical field [0001] The invention relates to a transmission-type polarization aberration compensation device based on polarization modulation of split light paths, which can realize automatic compensation of polarization aberration after light passes through an optical system, and belongs to the technical field of polarization optics. Background technique [0002] For all optical systems in the case of non-normal incidence, there is polarization aberration, that is, the polarization states at different positions on the same outgoing wavefront are also different. If the system contains multiple optical medium interfaces, the polarization of each medium interface The accumulation of aberrations to the image plane will produce a certain polarization effect, which will affect the normal operation of the system in severe cases. Other polarization-sensitive systems such as high numerical aperture microscopy systems, lithography projection systems, or laser resonator systems hav...

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Problems solved by technology

[0004] In order to overcome the problems of poor versatility and low precision in existing polarization compensation devices, the present invention proposes a transmission-type polarization aberration compensation device based on split-light polarization modulation. Modulation of Delay and Bidirectional Decay

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