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Nickel oxide nano-particles reinforced gas sensor and preparing method thereof

A gas sensor, nanoparticle technology, applied in instruments, scientific instruments, measuring devices, etc., can solve problems such as undiscovered reports, and achieve the effects of simple preparation process, low cost, and improved detection efficiency

Inactive Publication Date: 2017-03-29
CHENGDU JUZHI IND DESIGN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the detection of some dangerous gases by graphene sensors, such as methane, has not been reported so far.

Method used

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  • Nickel oxide nano-particles reinforced gas sensor and preparing method thereof

Examples

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Effect test

Embodiment 1

[0016] Example 1: 1) Clean the flexible polyimide substrate in deionized water and dry it; 2) deposit indium-doped magnesium tin oxide with a thickness of 40 nanometers on the flexible polyimide substrate by magnetron sputtering ; 3) Deposit a 6-micron thick magnesium tin oxide layer on the indium-doped magnesium tin oxide layer using physical vapor deposition technology, and reserve an area for growing the first electrode on the ITO layer; 4) transfer the single-layer graphene to the oxide on the magnesium tin layer; 5) Spin-coat the nickel oxide nanoparticle solution on the graphene, and reserve an area for growing the second electrode on the graphene; the diameter of the nickel oxide nanoparticle is 1nm-1μm; 6) on the graphene The reserved area and the reserved area on the ITO layer are coated with silver paste and dried; a graphene / magnesium tin oxide gas sensor reinforced with nickel oxide nanoparticles is obtained.

Embodiment 2

[0017] Example 2: 1) The glass substrate was cleaned in deionized water and dried; 2) Magnetron sputtering was used to deposit 200 nm thick fluorine-doped magnesium tin oxide on the glass substrate;

[0018] 3) Deposit an 8-micron thick magnesium tin oxide layer on the fluorine-doped magnesium tin oxide layer using physical vapor deposition technology, and reserve an area for growing the first electrode on the FTO layer; 4) Transfer three layers of graphene to magnesium oxide on the tin layer; 5) spray nickel oxide nanoparticle solution on the graphene, and reserve an area for growing the second electrode on the graphene layer; the diameter of the nickel oxide nanoparticles is 1nm-1μm; 6) on the graphene layer A gold electrode is thermally evaporated at the reserved area and on the reserved area on the fluorine-doped magnesium tin oxide layer; a graphene / magnesium tin oxide gas sensor enhanced by nickel oxide nanoparticles is obtained.

Embodiment 3

[0019] Example 3: 1) Clean the ceramic substrate in deionized water and dry it; 2) Use electron beam evaporation to deposit nickel metal with a thickness of 60 nanometers on the ceramic substrate; 3) Use a chemical water bath method on the nickel metal layer Deposit a 5 micron thick magnesium tin oxide layer, and reserve the area for growing the first electrode on the nickel metal layer; 4) transfer 10 layers of graphene to the magnesium tin oxide layer; 5) prepare nickel oxide nanoparticles on the graphene particle film, and reserve the area for growing the second electrode on the graphene layer; 6) screen-print silver electrodes on the reserved area of ​​the graphene layer and the reserved area on the nickel metal layer; obtain nickel oxide nanoparticle-enhanced Graphene / MgSnO gas sensor.

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Abstract

The invention relates to a nickel oxide nano-particles reinforced graphne / magnesium oxide gas sensor and a preparing method thereof. The graphene / magnesium oxide tin gas sensor is provided with, from bottom to top, a substrate, a conductive coating layer, a magnesium oxide tin layer, a graphene layer, and a nickel oxide nanoparticle layer in sequence, wherein the gas sensor is further provided with a first electrode and a second electrode, the first electrode is arranged on the conductive coating layer, and the second electrode is arranged on the graphene layer. The preparing method comprises the steps of precipitating the conductive coating layer on the substrate, and then precipitating the magnesium oxide tin layer; then transferring graphene to the magnesium oxide tin layer; preparing the nickel oxide nanoparticle layer on the graphene layer; finally producing electrodes on the graphene layer and the conductive coating layer respectively to obtain the gas sensor. According to the nickel oxide nano-particles reinforced graphne / magnesium oxide gas sensor and the preparing method thereof, a doping effect introduced by nickel oxide nanoparticles is made use of to obtain the graphne / magnesium oxide gas sensor with high conversion efficiency.

Description

technical field [0001] The invention relates to a novel gas sensor and a manufacturing method thereof, in particular to a nickel oxide nanoparticle-enhanced graphene / magnesium tin oxide gas sensor and a preparation method thereof, belonging to the technical field of gas sensors. Background technique [0002] Nanomaterials have the characteristics of large specific surface area and electrical properties sensitive to surface adsorption. Applying nanotechnology to the field of sensing is expected to produce sensor devices with fast response, high sensitivity and good selectivity. Semiconducting metal oxides, especially MgSn-based nanomaterials, have attracted extensive attention due to their superior optical, electrical, and gas sensing properties. Studies have shown that doping can further improve the gas sensing performance of tin oxide-based nanomaterials. Although tin oxide-based gas sensors have made some achievements, their sensitivity and selectivity still need to be fu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/00
CPCG01N27/00
Inventor 文国栋
Owner CHENGDU JUZHI IND DESIGN
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