Preparation method of thin film generator and its application in air conditioner external unit
A technology for air-conditioning external units and generators, applied in generators/motors, friction generators, applications, etc., can solve problems such as small deformation of piezoelectric generators, achieve high energy conversion efficiency, good stability, and strong applicability Effect
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[0049] The present invention will be further described below in conjunction with the embodiments and accompanying drawings.
[0050] Such as Figure 1-2 Shown, a kind of preparation method of thin film generator comprises the following steps:
[0051] Step 1, forming the first electrode of the generator on the upper surface of the substrate;
[0052] Step 2, forming a zinc oxide seed layer on the upper surface of the first electrode. Before the zinc oxide seed layer is formed, in order to improve the adhesion of the zinc oxide to the first electrode, a metal chromium layer with a thickness of 5 nanometers is plated on the upper surface of the first electrode.
[0053] Both the metal chromium layer and the zinc oxide seed layer are formed in one CVD device. In addition, methods such as thermal decomposition of zinc acetate and spin coating can also be used to form the zinc oxide seed layer.
[0054] Step 3, using a chemical solution method to form a zinc oxide nanowire array ...
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