BN-SiC composite particles and a preparation method thereof
A technology of composite particles and particles, applied in the field of ceramic composite materials, can solve the problems of reducing the solid-liquid interface energy of the melt, uneven distribution of ceramic particles, agglomeration of ceramic particles, etc., and achieves good compactness, simple operation steps and uniform thickness. Effect
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Embodiment 1
[0055] Put SiC particles with a size of 100 μm into the designed tooling; use a mechanical pump and a molecular pump to vacuum the vacuum chamber to make the background vacuum degree reach 5×10 -4 Pa;
[0056] Turn on the gas flow meter and fill the vacuum chamber with Ar until the pressure in the chamber reaches 3Pa;
[0057] Turn on the sample stage heating device to make the temperature of SiC particles reach 400°C;
[0058] Turn on the swing device of the sample stage, and set the swing frequency to 50 times / min;
[0059] Turn on the BN target, adjust its RF power to 250W, and sputter for 2 hours; the size of the BN target is Φ100mm×5mm, and the purity of the BN target is 99.9999%;
[0060] Turn off the RF power supply and keep warm for 20 minutes;
[0061] Turn off the gas flow meter, high valve, molecular pump, and mechanical pump in turn, open the vent valve, and after the vacuum chamber and atmospheric pressure are balanced, open the vacuum chamber and take out the ...
Embodiment 2
[0065] Put SiC particles with a size of 0.5 μm into the designed tooling; use a mechanical pump and a molecular pump to evacuate the vacuum chamber to make the background vacuum degree reach 4×10 -4 Pa;
[0066] Turn on the gas flow meter and fill the vacuum chamber with Ar until the pressure in the chamber reaches 0.5Pa;
[0067] Turn on the sample stage heating device to make the temperature of SiC particles reach 300°C;
[0068] Turn on the swing device of the sample stage, and set the swing frequency to 150 times / min;
[0069] Turn on the BN target, adjust its RF power to 230W, and sputter for 4 hours; the size of the BN target is Φ100mm×5mm, and the purity of the BN target is 99.9999%;
[0070] Turn off the RF power supply and keep warm for 60min;
[0071] Turn off the gas flow meter, high valve, molecular pump, and mechanical pump in turn, open the vent valve, and after the vacuum chamber and atmospheric pressure are balanced, open the vacuum chamber and take out the ...
Embodiment 3
[0075] Put SiC particles with a size of 700 μm into the designed tooling; use a mechanical pump and a molecular pump to evacuate the vacuum chamber to make the background vacuum degree reach 4×10 -3 Pa;
[0076] Turn on the gas flow meter and fill the vacuum chamber with Ar until the pressure in the chamber reaches 15Pa;
[0077] Turn on the sample stage heating device to make the temperature of SiC particles reach 500 °C;
[0078] Turn on the swing device of the sample stage, and set the swing frequency to 10 times / min;
[0079] Turn on the BN target, adjust its RF power to 150W, and sputter coating for 5 hours; the size of the BN target is Φ100mm×5mm, and the purity of the BN target is 99.9999%;
[0080] Turn off the RF power supply and keep warm for 30min;
[0081] Turn off the gas flow meter, high valve, molecular pump, and mechanical pump in turn, open the vent valve, and after the vacuum chamber and atmospheric pressure are balanced, open the vacuum chamber and take o...
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