Method for coating high temperature-resistant diamond on graphite substrate

Abstract

The invention discloses a method for coating high temperature-resistant diamond on a graphite substrate. The method comprises the following steps: an ultrasonic cleaning step, namely, performing ultrasonic cleaning on a surface of the graphite substrate; an ion etching step, namely, placing the graphite substrate into a coating cavity, vacuumizing the coating cavity to 6.0 *10<3> Pa, and performing the ion etching on the surface of the graphite substrate; a bottom layer coating step: vacuumizing the coating cavity to 2.66 *10<3> Pa, and performing bottom layer coating on the graphite substrate, wherein the bottom layer which is obtained by the bottom layer coating is one of a SiC layer, an AlTi layer, an AlTiN layer, a Si layer or a SiN layer; a functional layer coating step, namely, performing functional layer coating on the bottom layer, wherein the obtained functional layer is a hydrogen-containing or hydrogen-free diamond-like layer or a metal-doped diamond-like layer; a material taking step, namely, relieving the vacuum of the coating cavity, and taking out a sample. The method has the technical effects that a protecting effect on the graphite substrate can be achieved in an oxygen-free environment at 600 to 900 DEG C after the graphite substrate is coated with a diamond-like film.

Description

technical field [0001] The invention relates to a high-temperature resistant diamond-like carbon coating method on a graphite base material and the field of vacuum coating. Background technique [0002] Curved screens have been widely used in current electronic consumer products such as mobile phones, but there are still technical bottlenecks restricting their large-scale use in the production of curved screens. [0003] When making a curved screen, it is usually used in a high-temperature oxygen-free environment or a high-temperature nitrogen atmosphere protection environment, using a graphite mold to press the softened glass material, and then polishing the glass material, because of the limitations of the graphite material itself, There are several major problems in the process: [0004] First, the graphite mold has a short life: usually only a few thousand curved screens can be pressed at 650°C. [0005] Second, the yield rate is low: due to the loose material of graph...

AI Technical Summary

Problems solved by technology

[0004] First, the graphite mold has a short service life: usually only a few thousand curved screens can be pressed at 650°C

[0005] Second, the yield rate is low: due to the loose material of graphite itself, dust is prone to appear. Even if the surface has been polished, during the pressing process, with the prolongation of use time, more and more graphite particles are attached to the surface of the curved screen , which greatly increases the difficulty of polishing and greatly reduces the yield rate;

The surface of this film must be fairly flat, defect-free and high temperature resistant, but the current diamond-like carbon film is not yet able to do so.

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