Capacitive detecting and driving integration circuit capable of being compatible with high frequency and high voltage feedback

Abstract

The invention relates to a capacitive detecting and driving integration circuit capable of being compatible with high frequency and high voltage feedback, which comprises a capacitance detecting and driving module, a feedback noise copying module and a high frequency subtraction module, and is characterized in that the capacitance detecting and driving module is used for realizing integration of capacitance detecting and electrostatic driving, input of the capacitance detecting and driving module is excitation voltage and driving voltage, the driving voltage is composed of a preload portion and a feedback portion, and output of the capacitance detecting and driving module is differential capacitance detecting signals with coupled noises caused by driving; the capacitance detecting and driving module comprises an excitation source, a differential capacitor to be detected and driven and a differential transformer circuit; the feedback noise copying module is used for copying noises, which are coupled to a detection channel, of feedback driving voltage; and the high frequency subtraction module is used for receiving the detecting signals carrying driving coupled noises which are outputted by the capacitance detecting and driving module and the copied driving coupled noises outputted by the feedback noise copying module, and subtracting the copied driving coupled noises from the detecting signals carrying driving coupled noises so as to realize a purpose of eliminating high frequency and high voltage feedback noises.

Description

technical field [0001] The invention relates to a capacitive detection-drive integrated circuit for micro-displacement detection and drive. Background technique [0002] When the satellite is in orbit, due to the periodic work of the moving parts or the alternation of cold and heat when the satellite enters and exits the shadow, it will cause the satellite's local or overall small-amplitude and broadband micro-vibration, which is not suitable for most spacecraft tasks. Can have a noticeable impact and are usually ignored. However, with the in-depth development of activities such as high-resolution satellites, inter-satellite laser communication, and deep space scientific exploration, the payloads carried on spacecraft are becoming more and more sophisticated. In order to give full play to the performance of ultra-precision payloads, space-based super The static platform has high-sensitivity micro-displacement sensing capability and high-bandwidth driving capability to achie...

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Problems solved by technology

However, this invention has two limitations: one is that after the feedback drive voltage is introduced, it will be superimposed on the excitation voltage to charge and discharge the diode, changing the signal amplitude of the positive and negative half cycles of the excitation voltage, which will cause confusion in the charging and discharging sequence in severe cases. The circuit cannot work; the second is that when the driving voltage has a high-frequency component, it cannot be decoupled from the excitation voltage source, so that the differential capacitance value cannot be detected correctly; the third is that when the driving voltage amplitude is high, the diode may be broken down and Damage to instrumentation amplifiers

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