A Method for Preparation of Thermoplastic Polymer Hierarchical Structure Using Room Temperature Reverse Embossing Technology
A thermoplastic polymer and polymer technology, applied in the direction of nanotechnology, can solve the problems of complex operation, long time consumption, high equipment, etc., achieve the effect of short time consumption, avoiding the process of high temperature and high pressure energy consumption, and improving the patterning efficiency
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Embodiment 1
[0026] Step 1: Dissolution of thermoplastic polymer
[0027] Solid polymethyl methacrylate (PMMA) was heated and dissolved in acetone solution by ultrasonic heating to prepare a PMMA solution with a mass concentration of 2.5%.
[0028] Step 2: Preparation of soft template
[0029] Weigh the prepolymer of polydimethylsiloxane (PDMS) and the initiator, the mass ratio is 10:1, stir and mix; The surface of a silicon template with a width of 1 μm and a spacing of 1 μm is cured at 60 ° C; after curing, the PDMS is separated from the silicon template to obtain a soft PDMS template (PDMS-1) and strips with a strip width of 1 μm and a spacing of 3 μm. PDMS soft template (PDMS-2) with a strip width of 1 μm and a pitch of 1 μm.
[0030] Step 3: Spin coating thermoplastic polymer on the surface of soft template
[0031] Under the conditions of rotation speed of 4000rpm and rotation time of 30s, the PMMA solution was spin-coated on the surface of PDMS-1 and PDMS-2 soft templates respect...
Embodiment 2
[0041] Step 1: Dissolution of thermoplastic polymer
[0042] Solid polymethyl methacrylate (PMMA) was heated and dissolved in acetone solution by ultrasonic heating to prepare a PMMA solution with a mass concentration of 2.5%.
[0043] Step 2: Preparation of soft template
[0044] Weigh the prepolymer and initiator of polydimethylsiloxane (PDMS), the mass ratio is 10:1, stir and mix; The surface of the silicon template with a width of 0.8 μm and a spacing of 0.8 μm is cured at 60 ° C; after curing, the PDMS is separated from the silicon template to obtain a soft PDMS template (PDMS-1) with a strip width of 1 μm and a spacing of 3 μm And a PDMS soft template (PDMS-3) with a grid width of 1 μm and a spacing of 1 μm.
[0045] Step 3: Spin coating thermoplastic polymer on the surface of soft template
[0046] Under the conditions of rotation speed of 4000rpm and rotation time of 30s, the PMMA solution was spin-coated on the surface of PDMS-1 and PDMS-3 soft templates respective...
Embodiment 3
[0056] Step 1: Dissolution of thermoplastic polymer
[0057] Solid polystyrene (PS) was heated and dissolved in acetone solution by ultrasonic heating, and a PS solution with a mass concentration of 2% was prepared.
[0058] Step 2: Preparation of soft template
[0059] Weigh the prepolymer and initiator of polydimethylsiloxane (PDMS), the mass ratio is 10:1, stir and mix; then cast on a silicon template with a strip width of 3 μm and a spacing of 1 μm, with a strip width of A silicon template with a width of 1.5 μm and a spacing of 0.8 μm, and a surface of a silicon template with a strip width of 0.8 μm and a spacing of 0.8 μm were cured at 60° C. After curing, the PDMS was separated from the silicon template to obtain a strip width of PDMS soft template with 1 μm and spacing of 3 μm (PDMS-1), PDMS soft template with strip width of 0.8 μm and spacing of 1.5 μm (PDMS-4) and PDMS soft template with strip width of 0.8 μm and spacing of 0.8 μm Template (PDMS-5).
[0060] Step ...
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