An on-chip integrated optical power beam splitter based on silicon-based metamaterials
An integrated optical and metamaterial technology, applied in instruments, optics, light guides, etc., can solve the problems of poor wavelength independence and small size, and achieve the effect of reducing insertion loss, facilitating on-chip integration, and compact structure
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[0024] The present invention will be further described in detail with reference to the accompanying drawings and implementation examples.
[0025] The invention relates to an on-chip integrated optical power beam splitter based on a silicon-based metamaterial, which is used to realize equal power beam splitting of super multi-path light. Such as figure 1 As shown, it includes a rectangular silicon waveguide and 8 parallel tapered silicon waveguides. The specific implementation is to cut the second half of the entire rectangular silicon waveguide into 8 tapered shapes with different widths according to the size ratio. The refractive index of the entire silicon waveguide is 3.46; The length*width*height dimensions of the uncut rectangular silicon waveguide are: 10um*12um*0.22um, used as the input port, and 8 parallel tapered silicon waveguides cut in parallel are used as the output port.
[0026] The tapered silicon waveguide is a horizontal trapezoid on the xy plane, the width...
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