System for recycling hydrogen in production process of polycrystalline silicon

A production process and recovery system technology, applied in hydrogen/synthesis gas production, hydrogen separation, hydrogen separation using liquid contact, etc., can solve the problems of hydrogen compressor wear and damage, hydrogen compressor maintenance difficulties, etc., to avoid wear and damage, Effects of reducing hydrogen consumption and improving purity

Active Publication Date: 2017-06-13
XINTE ENERGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to provide a hydrogen recovery system in the polysilicon production process in view of the above-mentioned deficiencies in the prior art. It solves the problem of difficult maintenance of the hydrogen compressor after long-term operation, and the system can process dusty hydrogen and oily hydrogen at the same time, and the purity of the recovered hydrogen is greatly improved

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  • System for recycling hydrogen in production process of polycrystalline silicon

Examples

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Embodiment 1

[0037] Such as figure 1 As shown, this embodiment provides a hydrogen recovery system in the polysilicon production process, including:

[0038] Oil-containing hydrogen buffer tank 1, used to store high boiling substance cracking gas, hydrogen protective gas for cold hydrogenation, hydrogen protective gas for recovery of reduction tail gas; high boiling substance cracking gas, hydrogen protective gas for cold hydrogenation, hydrogen protective gas for recovery of reduction tail gas Both are oil-containing hydrogen. The oil-containing hydrogen buffer tank 1 is equipped with a regulating valve, and the pressure of the oil-containing hydrogen buffer tank 1 is 50KPaG, and the pressure is released when it exceeds the system pressure.

[0039] A hydrogen compressor 2 is connected with the oil-containing hydrogen buffer tank 1, and the hydrogen compressor 2 is used for compressing and deoiling;

[0040]A hydrogen leaching tower 3 is connected with the hydrogen compressor 2, and the...

Embodiment 2

[0065] Use the hydrogen recovery system in the polysilicon production process in Example 1 to recover dusty hydrogen and oily hydrogen:

[0066] 1) Supplement fresh silicon tetrachloride into the hydrogen leaching tower, and establish the liquid level of the hydrogen leaching tower to reach 1000mm to ensure the safe start of the chlorosilane circulation pump;

[0067] 2) Start the chlorosilane circulation pump, put into use the chlorosilane cryocooler, and establish a chlorosilane circulation volume of 25m 3 / h, the system temperature is reduced to -20°C, and the liquid level is stabilized at 1700mm.

[0068] 3) Put into use the oil-containing hydrogen buffer tank, feed air into the system, and when the system pressure reaches 50KPaG, start the hydrogen compressor, supply gas to the hydrogen leaching tower and return to adjust the pressure of the oil-containing hydrogen buffer tank, and adjust the valve on the top of the hydrogen leaching tower Regulate the pressure of the hy...

Embodiment 3

[0073] Use the hydrogen recovery system in the polysilicon production process in Example 1 to recover dusty hydrogen and oily hydrogen:

[0074] 1) Supplement fresh chlorosilane (silicon tetrachloride: trichlorosilane volume ratio 4:1) into the hydrogen elution tower, and establish the liquid level of the hydrogen elution tower to reach 1000mm to ensure the safety of the chlorosilane circulating pump start up;

[0075] 2) Start the chlorosilane circulation pump, put into use the chlorosilane cryocooler, and establish a chlorosilane circulation volume of 20m 3 / h, the system temperature is reduced to -40°C, and the liquid level is stabilized at 1700mm.

[0076] 3) Put into use the oil-containing hydrogen buffer tank, feed air into the system, and when the system pressure reaches 30KPaG, start the hydrogen compressor, supply gas to the hydrogen leaching tower and return to adjust the pressure of the oil-containing hydrogen buffer tank, and adjust the valve on the top of the hyd...

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Abstract

The invention discloses a system for recycling hydrogen in the production process of polycrystalline silicon. The system comprises an oil-containing hydrogen buffer tank, a hydrogen compressor connected with the oil-containing hydrogen buffer tank, a hydrogen eluting column connected with the hydrogen compressor, a first filter connected with a column reactor of the hydrogen eluting column, wherein the hydrogen eluting column is further provided with an inlet to introduce dust-containing hydrogen produced in the production process of polycrystalline silicon and is used to elute by taking introduced chlorosilane as an eluent, and the first filter is used to filter to obtain filtered chlorosilane. The system avoids the abrasion damage of silica dust in the dust-containing hydrogen on the hydrogen compressor, and solves the problem of difficulty in maintenance of the hydrogen compressor after long-term operation; the system can treat the dust-containing hydrogen and the oil-containing hydrogen at the same time, the purity of the obtained recycled hydrogen is greatly improved, the loss of hydrogen and the number of electrolytic cells started are reduced, the system stability is improved, and the purity of the polycrystalline silicon prepared from the recycled hydrogen is further improved.

Description

technical field [0001] The invention belongs to the technical field of polysilicon production, and in particular relates to a polysilicon production [0002] Process hydrogen recovery system. Background technique [0003] The reduction tail gas recovery process in polysilicon production uses low-temperature condensation separation, high-pressure low-temperature absorption, and high-temperature and low-pressure analysis to circulate chlorosilane to separate and purify hydrogen, realize the recycling of materials, and play a key role in reducing the cost of polysilicon production. In this process, the solubility and absorption of chlorosilane to hydrogen chloride is extremely important. According to the dissolution and absorption characteristics of gas in solution, low temperature and high pressure are conducive to dissolution and absorption, so hydrogen chloride absorption should be carried out under high pressure and low temperature conditions. In the reduction tail gas rec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B3/52
CPCC01B3/52C01B2203/0465
Inventor 邹飞陈喜清张旭王玉丽张治锦郑宝刚黎远中
Owner XINTE ENERGY
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